Micro-electromechanical ink ejection mechanism with electro-magnetic actuation
View Patent ↗A micro-electromechanical ink ejection mechanism for an inkjet printhead includes a substrate. A nozzle chamber structure is arranged on the substrate and defines a nozzle chamber and an outlet in fluid communication with the nozzle chamber. An ink ejection member is suspended within the chamber and is displaceable towards and away from the outlet to eject ink from the outlet. The ink ejection member is capable of electro-magnetic actuation. An electro-magnetic actuator is configured to actuate the ink ejection member so that ink is ejected from the outlet.
1. A micro-electromechanical ink ejection mechanism for an inkjet printhead, the ink ejection mechanism comprising:
a substrate;
a nozzle chamber structure arranged on the substrate and defining a nozzle chamber and an outlet in fluid communication with the nozzle chamber;
a ink ejection member suspended within the chamber and displaceable towards and away from the outlet to eject ink from the outlet, the ink ejection member being capable of electro-magnetic actuation; and
an electro-magnetic actuator configured to actuate the ink ejection member so that ink is ejected from the outlet.
2. A micro-electromechanical ink ejection mechanism as claimed in claim 1 , wherein the ink ejection member is magnetic.
3. A micro-electromechanical ink ejection mechanism as claimed in claim 2 , further comprising a resilient fastening means which fastens the permanent magnet to the nozzle chamber structure and thereby suspends the permanent magnet within the chamber.
4. A micro-electromechanical ink ejection mechanism as claimed in claim 2 , wherein the ink ejection member comprises a pair of adjoining portions, one of the portions being positively polarized and the other being negatively polarized.
5. A micro-electromechanical ink ejection mechanism as claimed in claim 4 , wherein the ink ejection member is in the form of a paddle with one of said adjoining portions defining one layer of the paddle and the other of said adjoining portions defining another layer of the paddle.
6. A micro-electromechanical ink ejection mechanism as claimed in claim 1 , wherein the substrate comprises a wafer substrate layer, and a drive circuitry layer deposited on the wafer substrate layer and configured to drive the actuator.
7. A micro-electromechanical ink ejection mechanism as claimed in claim 1 , wherein the actuator comprises a pair of coils each located within the chamber on a respective side of the ink ejection member.