System for displaying images including thin film transistor device and method for fabricating the same
View Patent ↗A system for displaying images. The system comprises a thin film transistor (TFT) device comprising a substrate having a pixel region. An active layer is disposed on the substrate of the pixel region, comprising a channel region, a pair of source/drain regions separated by the channel region. The channel region comprises dopants with a first conductivity type and a second conductivity type opposite to the first conductivity type. A gate structure is disposed on the active layer, comprising a stack of a gate dielectric layer and a gate layer. A method for fabricating a system for displaying images including the TFT device is also disclosed.
1. A system for displaying images, comprising:
a substrate comprising a pixel region;
a thin film transistor device located in the pixel region, comprising:
an active layer disposed on the substrate of the pixel region, comprising a channel region, a pair of source/drain regions separated by the channel region; and
a gate structure disposed on the active layer, comprising a stack of a gate dielectric layer and a gate layer;
wherein the channel region comprises dopants with a first conductivity type and a second conductivity type opposite to the first conductivity type; and
another thin film transistor device located outside of the pixel region, which comprises a channel region comprising dopant with only a single conductivity type.
2. The system as claimed in claim 1 , wherein the active layer comprises low temperature polysilicon.
3. The system as claimed in claim 1 , wherein the gate layer comprises molybdenum.
4. The system as claimed in claim 1 , wherein the gate dielectric layer comprises silicon oxide, silicon nitride or a combination thereof.
5. The system as claimed in claim 1 , wherein the first conductivity type is N-type and the second conductivity is P-type.
6. The system as claimed in claim 5 , wherein the buffer layer comprises silicon oxide, silicon nitride or a combination thereof.
7. The system as claimed in claim 1 , further comprising a buffer layer disposed between the substrate and the active layer.
8. The system as claimed in claim 1 , further comprising:
a flat panel display device comprising the thin film transistor device; and
an input unit coupled to the flat panel display device and operative to provide input to the flat panel display device, such that the flat panel display device displays images.
9. The system as claimed in claim 8 , wherein the system comprises an electronic device comprising the flat panel display device.
10. The system as claimed in claim 9 , wherein the electronic device is a laptop computer, a mobile phone, a digital camera, a personal digital assistant, a desktop computer, a television, a car display or a portable DVD player.
11. The system as claimed in claim 1 , wherein dopants with both first and second conductivity types are within the channel region in the active layer of the thin film transistor device.
12. The system as claimed in claim 11 , wherein the first conductivity type is N-type, and the second conductivity type is P-type.
13. The system as claimed in claim 1 , wherein the first conductivity type is N-type, and the second conductivity type is P-type.
14. The system as claimed in claim 1 , wherein said another thin film transistor device is located in a driving circuit region.
15. A method for fabricating a system for displaying images, comprising:
(a) providing a substrate comprising a pixel region;
(a) forming a thin film transistor device in the pixel region, comprising:
disposing an active layer on the substrate of the pixel region, comprising a channel region, a pair of source/drain regions separated by the channel region; and
disposing a gate structure on the active layer, comprising a stack of a gate dielectric layer and a gate layer;
wherein the channel region comprises dopants with a first conductivity type and a second conductivity type opposite to the first conductivity type; and
(c) forming another thin film transistor device located outside of the pixel region, which comprises a channel region comprising dopant with only a single conductivity type.
16. The method as claimed in claim 15 , wherein dopants with both first and second conductivity types are within the channel region in the active layer of the thin film transistor device.
17. The method as claimed in claim 15 , wherein the first conductivity type is one of N-type and P-type, and the second conductivity type is other one of N-type or P-type.
18. The method as claimed in claim 15 , wherein the active layer comprises low temperature polysilicon.
19. The system as claimed in claim 15 , wherein the gate layer comprises molybdenum.
20. The system as claimed in claim 15 , wherein the gate dielectric layer comprises silicon oxide, silicon nitride or a combination thereof.