Yttria sintered body and manufacturing method therefor
View Patent ↗To provide a yttria sintered body having an excellent corrosion resistance to halogen-based corrosive gases and plasma and an excellent thermal shock resistance, and adapted for use as a component member in manufacturing apparatuses for semiconductor and liquid crystal devices, particularly in a plasma process apparatus. A yttria sintered body including tungsten of an average particle size of 3 μm or less dispersed in the yttria so that a ratio of the tungsten relative to the yttria is ranging from 1 to 50% in terms of weight, and having an open pore rate of 0.2% or less and a thermal shock resistance by water submersion method of 200° C. or larger.
1. An yttria sintered body comprising yttria, and tungsten dispersed in the yttria in such a manner that a ratio of the tungsten relative to the yttria is ranging from 1 to 50% in terms of weight,
wherein an open pore rate of the yttria sintered body is 0.2% or less and
a thermal shock resistance of the yttria sintered body is 200° C. or more in a water submersion method.
2. The yttria sintered body according to claim 1 , wherein the tungsten has an average particle size of 3 μm or less.
3. An yttria sintered body comprising yttria and tungsten dispersed the yttria in such a manner that a ratio of the tungsten relative to the yttria is ranging from 1 to 50% in terms of weight, wherein an open pore rate of the yttria sintered body is 0.2% or less.
4. The yttria sintered body according to claim 3 , wherein a volume resistivity is 10 6 Ω·cm or more and 10 13 Ω·cm or less at 20 to 400° C.