Organic thin film transistor and manufacturing method thereof
View Patent ↗An organic thin film transistor includes a substrate, a gate electrode, a gate insulating layer, a first electrode, and a second electrode disposed on the substrate, a first layer disposed on the substrate, the first layer being photosensitive, a second layer disposed on the first layer, the second layer being hydrophobic, an opening defined in the first and second layers, the opening corresponding to the gate electrode, and a hydrophilic organic semiconductor disposed in the opening.
1. An organic thin film transistor comprising:
a substrate;
a gate electrode, a gate insulating layer, a first electrode, and a second electrode sequentially disposed on the substrate;
a first layer disposed on the substrate, the first layer being photosensitive;
a second layer disposed on the first layer, the second layer being hydrophobic;
an opening defined in the first and second layers, the opening corresponding to the gate electrode and exposing portions of the gate insulating layer and the first and second electrodes; and
a hydrophilic organic semiconductor disposed in the opening, the hydrophilic organic semiconductor being in contact with the exposed portions of the first and second electrodes.
2. The organic thin film transistor as claimed in claim 1 , wherein the second layer includes a fluorinated polymer.
3. The organic thin film transistor as claimed in claim 2 , wherein the fluorinated polymer includes at least one of:
4. The organic thin film transistor as claimed in claim 1 , wherein the first layer is sensitive to light having a wavelength of less than or equal to about 248 nm.
5. The organic thin film transistor as claimed in claim 4 , wherein the first layer has positive photosensitivity.
6. The organic thin film transistor as claimed in claim 1 , wherein the hydrophilic organic semiconductor includes poly(9-9-dioctylfluorene-co-bithiophene).
7. A method of manufacturing an organic thin film transistor, the method comprising:
forming a gate electrode, a gate insulating layer, a first electrode, and a second electrode sequentially on a substrate;
forming a photosensitive film on the substrate;
forming a hydrophobic film on the photosensitive film;
selectively removing a portion of the photosensitive film by exposing the photosensitive film to a first light source to form an opening in the photosensitive film and the hydrophobic film, the opening exposing portions of the gate insulating layer and the first and second electrodes; and
coating a hydrophilic organic semiconductor on an entire surface of the substrate such that hydrophilic organic semiconductor remains in the opening, the hydrophilic organic semiconductor being in contact with the exposed portions of the first and second electrodes.
8. The method as claimed in claim 7 , wherein the gate electrode is formed between the substrate and the gate insulating layer, and the first and second electrodes are formed on the gate insulating layer.
9. The method as claimed in claim 8 , wherein the hydrophobic film includes at least one of
10. The method as claimed in claim 7 , wherein the first electrode is a source electrode and the second electrode is a drain electrode.
11. The method as claimed in claim 7 , wherein exposing the photosensitive film to the first light source causes ablation of the photosensitive film, such that the portion of the photosensitive film is removed and a corresponding portion of the hydrophobic film is removed.
12. The method as claimed in claim 11 , wherein the photosensitive film has positive photosensitivity.
13. The method as claimed in claim 7 , wherein the selective removal of the portion of the photosensitive film includes exposing the photosensitive film to a laser light source using a photo mask.
14. The method as claimed in claim 13 , wherein the laser light source is an excimer laser light source.
15. The method as claimed in claim 7 , wherein coating the hydrophilic organic semiconductor on the substrate includes providing a solution of the hydrophilic organic semiconductor in a solvent;
coating the solution on the substrate; and
subsequently, removing the solvent.
16. The method as claimed in claim 15 , wherein the hydrophilic organic semiconductor includes poly(9-9-dioctylfluorene-co-bithiophene).
17. The method as claimed in claim 16 , wherein the solvent includes xylene.
18. The method as claimed in claim 7 , wherein the photosensitive film and the hydrophobic film are electrically insulating films.
19. The method as claimed in claim 7 , wherein the hydrophobic film includes a fluorinated polymer.
20. The method as claimed in claim 7 , wherein the photosensitive film is sensitive to light having a wavelength of less than or equal to about 248 nm.