Piezoelectric vibrator, oscillator, electronic part, electronic apparatus, method of fabricating piezoelectric vibrator and method of fabricating electronic part
To provide a piezoelectric vibrator, an oscillator, an electronic part, an electronic apparatus, a method of fabricating a piezoelectric vibrator and a method of fabricating an electronic part capable of swiftly and easily providing a plurality of electrodes for applying a voltage to a piezoelectric vibrating piece while maintaining airtightness at inside of a hermetically sealed vessel, there is provided a piezoelectric vibrator including a hermetically sealed vessel 2 constituted by overlapping a lid member 6 and a base member 7 in a plate-like shape, a piezoelectric vibrating piece 3 provided at inside of the hermetically sealed vessel 2 , a lead-out electrode 16 provided at an overlapping face 6 a of the lid member 6 , electrically connected to the piezoelectric vibrating piece 3 by way of a connecting portion, and extending the connecting portion 15 to an edge portion of the overlapping face 6 a of the lid member 6 , an external electrode 27 electrically connected to the lead-out electrode 16 from a side face of the hermetically sealed vessel 2 , and a bonding film 20 comprising a metal or silicone provided between the overlapping face 6 a of the lid member 6 and an overlapping face 7 a of the base member 7 , in which an insulating film 22 is provided between the lead-out electrode 16 and the bonding film 20.
1. A piezoelectric vibrator comprising:
a hermetically sealed vessel constituted by overlapping a lid member and a base member in a plate-like shape in a thickness direction;
a piezoelectric vibrating piece provided at inside of the hermetically closed vessel;
a lead-out electrode provided at an overlapping face of the lid member, electrically connected to the piezoelectric vibrating piece by way of a connecting portion, and extending the connecting portion to an edge portion of the overlapping face of the lid member;
an external electrode electrically connected to the lead-out electrode from a side face of the hermetically closed vessel; and
a bonding film comprising a metal or silicone provided between the overlapping face of the lid member and an overlapping face of the base member;
wherein an insulating film is provided between at least the lead-out electrode and the bonding film in between the overlapping face of the lid member and the overlapping face of the base member.
2. The piezoelectric vibrator according to claim 1 , wherein the lid member and the base member comprise glass; and
wherein the lid member and the base member are anodically bonded by way of the bonding film.
3. The piezoelectric vibrator according to claim 1 , wherein the overlapping face of the lid member comprises an electrode face at which the lead-out electrode is extended and a nonelectrode face; and
wherein the insulating film is provided over the lead-out electrode and the nonelectrode face, and a surface of the insulating film on a side of the base member is formed with a flattening portion leveled by being flattened.
4. The piezoelectric vibrator according to claim 1 , wherein at least three of the lead-out electrodes are provided.
5. The piezoelectric vibrator according to claim 4 , wherein a plurality of the piezoelectric vibrating pieces are provided.
6. An oscillator, wherein the piezoelectric vibrator according to claim 1 is electrically connected to an integrated circuit as an oscillation piece.
7. An electronic apparatus comprising the piezoelectric vibrator according to claim 1 .