MEMS based current sensor using magnetic-to-mechanical conversion and reference components
View Patent ↗A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.
1. A micro-electromechanical system (MEMS) current sensor, comprising:
a first conductor for measuring a current;
a first coil for receiving a first predetermined bias current coupled to said current;
a second coil for receiving a second predetermined bias current coupled to said current; and
a MEMS-based magnetic field sensing component having a magneto-MEMS component for sensing a shaped magnetic field and, in response thereto, providing an indication of said current in said first conductor.
2. The MEMS current sensor of claim 1 , wherein said MEMS-based magnetic field sensing component comprises at least one of a compensator for enhancing a function of said MEMS-based magnetic field sensing component, and an output component.
3. The MEMS current sensor of claim 1 , wherein said magnetic field shaping component comprises at least one of a current-to-magnetic field converter and a magnetic field-to-magnetic flux converter.
4. The MEMS current sensor of claim 1 , wherein said magneto-MEMS component comprises a magnetic-to-mechanical converter coupled to a structural component for providing a mechanical indication of said shaped magnetic field.
5. The MEMS current sensor of claim 4 , wherein said MEMS-based magnetic field sensing component further comprises a reference component coupled to said structural component for providing a reference indicator for said mechanical indication.
6. The MEMS current sensor of claim 5 , wherein said reference component comprises a current carrying conductor, electrical conductive coil, a magneto-restrictive element, and an element generating a Lorentz Force.