MEMS based current sensor using magnetic-to-mechanical conversion and reference components

1. A method for sensing a current using a micro-electromechanical system (MEMS), comprising:

shaping a magnetic field produced with a current in a first conductor;

sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit; and

providing an indication of the current in the first conductor.

2. The method of claim 1 , further comprising controlling a function of the MEMS-based magnetic field sensing component.

3. The method of claim 2 , wherein said controlling step comprises controlling at least one of the group consisting of an application of an excitation signal from an excitation source to the MEMS-based magnetic field sensing component, and a selection of an excitation signal from among a plurality of excitation sources.

4. The method of claim 1 , further comprising:

converting a mechanical change signal to an electrical signal representative thereof; and

providing the electrical signal as an output signal indicative of the current in the first conductor.

5. The method of claim 1 , further comprising mechanically supporting the magneto-MEMS component.

6. The method of claim 1 , wherein said sensing step comprises sensing with a mechanical sense component a mechanical indication of the shaped magnetic field.

7. The method of claim 6 , further comprising providing with a transducer a detectable measure and induced by the magneto-MEMS component.

8. The method of claim 6 , further comprising providing with a reference component a reference indicator for the mechanical indication.