Thin film transistor and method of manufacturing the same
View Patent ↗A thin film transistor (TFT) and a method of manufacturing the same, and more particularly, a TFT for reducing leakage current and a method of manufacturing the same are provided. The TFT includes a flexible substrate, a diffusion preventing layer formed on the flexible substrate, a buffer layer formed of at least two insulated materials on the diffusion preventing layer, a semiconductor layer formed on a region of the buffer layer to include a channel layer and a source and drain region, a gate insulating layer formed on the buffer layer including the semiconductor layer, a gate electrode formed on the gate insulating layer in a region corresponding to the channel layer, an interlayer insulating layer formed on the gate insulating layer including the gate electrode, and source and drain electrodes formed in the interlayer insulating layer to include a predetermined contact hole that exposes at least a region of the source and drain region and to be connected to the source and drain region.
1. An electronic device, comprising:
a thin film transistor;
a flexible substrate comprising a metallic sheet;
a semiconductor layer formed over the flexible substrate, the semiconductor layer comprising a source region, a drain region and a channel region located between the source and drain regions;
a gate electrode formed over the semiconductor layer;
a gate insulating layer interposed between the gate electrode and the semiconductor layer;
a source electrode contacting the semiconductor layer;
a drain electrode contacting the semiconductor layer;
a buffer layer interposed between the flexible substrate and the semiconductor layer, the buffer layer comprising one or more materials selected from the group consisting of SiO 2 , SiNx and SiNO, wherein the buffer layer comprises at least first, second, third, and fourth sequentially stacked sub-layers, wherein the first and third sub-layers are formed of a first material, and the second and fourth sub-layers are formed of a second material, wherein the first and second materials are different from one another in composition; and
a diffusion barrier comprising Ti or Ta and interposed between the flexible substrate and the buffer layer, wherein the diffusion barrier is a single layer that contacts both the flexible substrate and the buffer layer, and wherein the diffusion barrier is configured to prevent impurities from diffusing from the substrate into the semiconductor layer.
2. The device of claim 1 , wherein the metallic sheet comprises one or more materials selected from the group consisting of stainless steel (SUS) and Ti.
3. The device of claim 1 , wherein the diffusion barrier comprises one or more materials selected from the group consisting of TiN, TaSiN, TiSiN and TiAlN.
4. The device of claim 1 , wherein the diffusion barrier has a thickness between about 100 nm and about 500 nm.
5. The device of claim 1 , wherein the buffer layer has a thickness between about 50 nm and about 2 μm.
6. The device of claim 1 , wherein the first material is SiO 2 and the second material is SiNx.
7. The device of claim 1 , wherein the semiconductor layer comprises an organic semiconductor material.