Laser induced thermal imaging apparatus with contact frame
A laser induced thermal imaging (LITI) apparatus and a method of making an electronic device using the same are disclosed. The LITI apparatus includes a chamber, a substrate support, a contact frame, and a laser source or oscillator. The LITI apparatus transfers a transferable layer from a film donor device onto a surface of an intermediate electronic device. The LITI apparatus uses a magnetic force to provide a close contact between the transferable layer and the surface of the intermediate device. The magnetic force is generated by magnetic materials formed in two components of the LITI apparatus that are spaced apart interposing transferable layer and the surface of the intermediate device. Magnets or magnetic materials are formed in the two following components of the LITI apparatus: 1) the intermediate device and the film donor device; 2) the intermediate device and the contact frame; 3) the substrate support and the film donor device; or 4) the substrate support and the contact frame.
1 . An apparatus for laser induced thermal imaging (LITI), comprising:
a substrate support configured to support an intermediate electronic device and a film donor device;
a laser source; and
a contact frame positioned between the substrate support and the laser source, the contact frame being movable relative to the substrate support between a first position and a second position, the first position being a first distance from the substrate support, the second position being a second distance from the substrate support, the second distance being greater than the first distance, the contact frame being configured to press the film donor device against the intermediate device about the first position, the contact frame comprising at least one magnetic material selected from the group consisting of a permanent magnet and an electromagnet.
2 . The apparatus of claim 1 , wherein the electromagnet is electrically connected to an external power source and is configured to be selectively stimulated.
3 . The apparatus of claim 1 , wherein the at least one magnetic material comprises one or more forms selected from the group consisting of plates, pieces, chips, rods, and particles.
4 . The apparatus of claim 1 , wherein the contact frame comprises a magnetic portion and a non-magnetic portion, and wherein the magnetic portion comprises the at least one magnetic material.
5 . The apparatus of claim 4 , wherein the magnetic portion is arranged generally closer to the substrate support than the non-magnetic portion.
6 . The apparatus of claim 1 , wherein the substrate support comprises at least one magnetic material selected from the group consisting of a permanent magnet, an electromagnet and a magnetically attractable material.
7 . The apparatus of claim 1 , further comprising:
an intermediate device comprising a receiving surface and placed over the substrate support; and
a film donor device comprising a transferable film layer and placed over the intermediate device.
8 . The apparatus of claim 7 , wherein the intermediate device and film donor device are arranged such that the receiving surface and the transferable film layer are in contact.
9 . The apparatus of claim 8 , wherein there is substantially no air bubble between the receiving surface and the transferable film layer.
10 . The apparatus of claim 7 , wherein the film donor device further comprises a light-to-heat conversion layer.
11 . The apparatus of claim 7 , wherein the film donor device does not comprise a magnetic layer comprising a permanent magnet or an electromagnet.
12 . The apparatus of claim 7 , wherein the intermediate electronic device comprises at least one magnetic material selected from the group consisting of a permanent magnet, an electromagnet and a magnetically attractable material.
13 . A method of making an electronic device using the apparatus of claim 1 , the method comprising:
placing an intermediate device on the substrate support, the intermediate device comprising a first surface and a second surface, the first surface facing the contact frame, the second surface contacting the substrate support;
placing a film donor device on the first surface of the intermediate device, the film donor device comprising a third surface and a fourth surface, the third surface facing the contact frame, the fourth surface facing the substrate support;
moving the contact frame to contact the third surface of the film donor device so that the fourth surface of the film donor device contacts the first surface of the intermediate device; and
pressing the film donor device against the intermediate device.
14 . The method of claim 13 , wherein the contact frame comprises an opening, and wherein the method further comprises irradiating a laser beam on the film donor device through the opening of the contact frame.
15 . The method of claim 13 , wherein the method is conducted in a vacuum atmosphere.
16 . The method of claim 13 , wherein the contact frame comprises an electromagnet, and wherein inducing the magnetic force comprises activating the electromagnet.
17 . The method of claim 13 , wherein pressing the film donor device comprises causing the weight of the contact frame to apply to the film donor device.
18 . The method of claim 13 , wherein pressing the film donor device further comprises causing the at least one magnetic material to magnetically interact with a magnet or magnetically attractable material underlying the first surface of the intermediate device.
19 . The method of claim 18 , wherein the intermediate device comprises the magnet or magnetically attractable material.
20 . The method of claim 18 , wherein the substrate support comprises the magnet or magnetically attractable material.