Method for fabricating semiconductor device
View Patent ↗An implantation step of a dopant ion for forming source and drain regions (S and D) is divided into one implantation of a dopant ion for forming a p/n junction with a well region ( 3 ), and one implantation of a dopant ion that does not influence a position of the p/n junction between the source and drain regions (S and D) and the well region with a shallow implantation depth and a large implantation amount. After conducting an activation heat treatment of the dopant, a surface of the source/drain region is made into cobalt silicide 12 , so that the source/drain region (S and D) can have a low resistance, and a p/n junction leakage can be reduced.
1. A method of fabricating a semiconductor device, comprising steps of:
(a) forming a gate electrode of an n-channel MISFET over a main surface of a first semiconductor region of p-type conductivity formed in a semiconductor body and a gate electrode of a p-channel MISFET over a main surface of a second semiconductor region of n-type conductivity formed in said semiconductor body;
(b) after said step (a), implanting ions in said first semiconductor region to form a third semiconductor region of n-type conductivity;
(c) after said step (a), implanting ions in said second semiconductor region to form a fourth semiconductor region of p-type conductivity;
(d) after said steps (b) and (c), forming side wall spacers on side surfaces of said gate electrodes;
(e) after said step (d), implanting ions in said first semiconductor region to form a fifth semiconductor region of n-type conductivity;
(f) after said step (d), implanting ions in said first semiconductor region to form a sixth semiconductor region of n-type conductivity;
(g) after said step (d), implanting ions in said second semiconductor region to form a seventh semiconductor region of p-type conductivity;
(h) after said step (d), implanting ions in said second semiconductor region to form an eighth semiconductor region of p-type conductivity; and
(i) after said steps (e), (f), (g) and (h), forming a cobalt silicide layer in said fifth semiconductor region and a cobalt silicide layer in said seventh semiconductor region,
wherein a dose amount in said step (e) is greater than a dose amount in said step (f) such that an impurity concentration of said fifth semiconductor region is greater than an impurity concentration of said sixth semiconductor region,
wherein a dose amount in said step (g) is greater than a dose amount in said step (h) such that an impurity concentration of said seventh semiconductor region is greater than an impurity concentration of said eighth semiconductor region,
wherein a depth of said sixth semiconductor region is greater than a depth of said fifth semiconductor region,
wherein a depth of said eighth semiconductor region is greater than a depth of said seventh semiconductor region,
wherein said gate electrode of said n-channel MISFET is a N-type gate electrode, and
wherein said gate electrode of said p-channel MISFET is a P-type gate electrode.
2. A method of fabricating a semiconductor device according to claim 1 , wherein a gate length of each of said gate electrodes is less than 200 nm.
3. A method of fabricating a semiconductor device according to claim 1 , wherein said MISFETs are included in a static random access memory (SRAM).
4. A method of fabricating a semiconductor device according to claim 1 , wherein said MISFETs are included in a dynamic random access memory (DRAM).
5. A method of fabricating a semiconductor device according to claim 1 , wherein said MISFETs are included in a logic LSI.
6. A method of fabricating a semiconductor device according to claim 1 , wherein said MISFETs are included in an LSI having both memory and logic.
7. A method of fabricating a semiconductor device according to claim 1 , wherein said step (i) includes sub-steps of:
forming a cobalt film over said third semiconductor region and said fourth semiconductor region:
forming a titanium nitride (TiN) film over said cobalt film; and
performing a heat treatment to form said cobalt silicide layers.
8. A method of fabricating a semiconductor device according to claim 1 , wherein in said step (e), arsenic ion is implanted, and wherein in said step (f), phosphorus ion is implanted.
9. A method of fabricating a semiconductor device according to claim 1 , wherein in said step (g), boron ion is implanted, and wherein in said step (h), boron ion is implanted.
10. A method of fabricating a-semiconductor device according to claim 1 , further comprising the step of:
(j) after said steps (b) and (c), forming an insulating film over said third semiconductor region and said fourth semiconductor region, wherein said steps (e), (f), (g) and (h) are conducted through said insulating film.
11. A method of fabricating a semiconductor device according to claim 1 , wherein a depth of said third semiconductor region is shallower than a depth of said sixth semiconductor region, and wherein a depth of said fourth semiconductor region is shallower than a depth of said eighth semiconductor region.
12. A method of fabricating a semiconductor device according to claim 1 , wherein said third semiconductor region and said fourth semiconductor region serve as lightly doped drains (LDD).
13. A method of fabricating a semiconductor device according to claim 1 , wherein said fifth semiconductor region and said sixth semiconductor region serve as source or drain regions.
14. A method of fabricating a semiconductor device according to claim 1 , wherein said seventh semiconductor region and said eighth semiconductor region serve as source or drain regions.