Micro displacement mechanism and magnetic disk apparatus
View Patent ↗A micro displacement mechanism minutely displaces an object to be driven. The micro displacement mechanism includes a stationary part and an actuator fixed to the stationary part so as to rotatably support the object to be driven. The actuator includes a pair of piezoelectric actuators attached to opposite side surfaces of said object to be driven, respectively. The pair of piezoelectric actuators are arranged at point symmetric positions with respect to a center of gravity of the object to be driven.
1. A micro displacement mechanism for minutely displacing an object to be driven, comprising:
a stationary part; and
an actuator fixed to the stationary part so as to rotatably support the object to be driven,
wherein said actuator includes a pair of piezoelectric actuators attached to opposite side surfaces of said object to be driven, respectively, and the pair of piezoelectric actuators are arranged at point symmetric positions with respect to a center of gravity of said object to be driven.
2. The micro displacement mechanism as claimed in claim 1 , wherein each of said piezoelectric actuators is made of a strip-shaped piezoelectric actuator having one end fixed to said side surface of said object to be driven and the other end fixed to said stationary part.
3. The micro displacement mechanism as claimed in claim 1 , wherein each of said piezoelectric actuators has a strip-shaped member and a strip-shaped piezoelectric element adhered to the strip-shaped member.
4. The micro displacement mechanism as claimed in claim 3 , wherein said strip-shaped piezoelectric element includes at least two active layers consisting of electrode-piezoelectric material-electrode, and said strip-shaped member is made of zirconia.
5. The micro displacement mechanism as claimed in claim 1 , wherein each of said piezoelectric actuators is made of an L-shaped piezoelectric actuator having one end fixed to said side surface of said object to be driven and the other end fixed to said stationary part.
6. The micro displacement mechanism as claimed in claim 5 , wherein each of said L-shaped piezoelectric actuators has an L-shaped member and piezoelectric elements adhered to each of two portions of the L-shaped member extending perpendicular to each other, respectively.
7. The micro displacement mechanism as claimed in claim 6 , wherein the piezoelectric elements are adhered to opposite side surfaces of each of said two portions, respectively.
8. The micro displacement mechanism as claimed in claim 5 , wherein each of said piezoelectric elements includes at least two active layers consisting of electrode-piezoelectric material-electrode, and each of said L-shaped members is made of zirconia.
9. The micro displacement mechanism as claimed in claim 1 , wherein said actuator further includes another pair of piezoelectric actuators attached to said opposite side surfaces of said object to be driven, respectively, and the another pair of piezoelectric actuators are arranged at point symmetric positions with respect to the center of gravity of said object to be driven.
10. The micro displacement mechanism as claimed in claim 9 , wherein each of said piezoelectric actuators is made of an L-shaped piezoelectric actuator having one end fixed to said side surface of said object to be driven and the other end fixed to said stationary part, and said L-shaped piezoelectric actuator has an L-shaped member and piezoelectric elements adhered to opposite side surfaces of each of two portions of the L-shaped member extending perpendicular to each other, respectively.
11. The micro displacement mechanism as claimed in claim 10 , wherein each of said piezoelectric elements includes at least two active layers consisting of electrode-piezoelectric material-electrode, and each of said L-shaped members is made of zirconia.