IP Library Granted Patent US 7,583,162
Granted Patent B2
US 7,583,162 · App. 11/522,907 · Granted Sep 1, 2009

Piezoelectric device and method for manufacturing the piezoelectric device

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Quick Facts
Patent No.
US 7,583,162
App. No.
11/522,907
Granted
Sep 1, 2009
Kind
B2
Abstract

A piezoelectric device includes a piezoelectric substrate having a connection pad, a package having an electrode pad, and a connection member to connect the electrode pad to the connection pad, the connection member being a metal member having a plurality of spherical metal particles connected to each other by sintering.

Claims (16)

1. A piezoelectric device, comprising:

a piezoelectric substrate having a connection pad;

a package having an electrode pad; and

a connection member to connect the electrode pad to the connection pad, the connection member being a metal member having a plurality of spherical metal particles connected to each other by sintering,

wherein the metal member has a porous structure, the porosity is created by an evaporated solvent.

2. The piezoelectric device according to claim 1 , wherein the plurality of spherical metal particles are gold particles.

3. The piezoelectric device according to claim 1 , wherein a particle diameter of the plurality of spherical metal particles is within a range from 0.2 μm to 0.5 μm.

4. A method for manufacturing a piezoelectric device, comprising:

preparing a piezoelectric substrate having a connection pad;

preparing a package having an electrode pad;

applying a connection member having a plurality of spherical metal particles and a solvent on the electrode pad;

mounting the piezoelectric substrate on the connection member; and

sintering and combining the plurality of spherical metal particles each other,

wherein the sintered and combined plurality of spherical metal particles have a porous structure, the step of sintering including evaporating a solvent to create the porosity.

5. The method for manufacturing a piezoelectric device according to claim 4 , wherein a heating temperature for sintering is within a range from 200 to 300 degrees centigrade.

6. The method for manufacturing a piezoelectric device according to claim 4 , wherein a particle diameter of the plurality of spherical metal particles is within a range from 0.2 μm to 0.5 μm.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 8, 2011
From: EPSON TOYOCOM CORPORATION
To: SEIKO EPSON CORPORATION
Reel/Frame 026717/0436 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 19, 2006
From: NAGANO, YOUJI
To: EPSON TOYOCOM CORPORATION
Reel/Frame 018321/0751 →