Piezoelectric device and method for manufacturing the piezoelectric device
View Patent ↗A piezoelectric device includes a piezoelectric substrate having a connection pad, a package having an electrode pad, and a connection member to connect the electrode pad to the connection pad, the connection member being a metal member having a plurality of spherical metal particles connected to each other by sintering.
1. A piezoelectric device, comprising:
a piezoelectric substrate having a connection pad;
a package having an electrode pad; and
a connection member to connect the electrode pad to the connection pad, the connection member being a metal member having a plurality of spherical metal particles connected to each other by sintering,
wherein the metal member has a porous structure, the porosity is created by an evaporated solvent.
2. The piezoelectric device according to claim 1 , wherein the plurality of spherical metal particles are gold particles.
3. The piezoelectric device according to claim 1 , wherein a particle diameter of the plurality of spherical metal particles is within a range from 0.2 μm to 0.5 μm.
4. A method for manufacturing a piezoelectric device, comprising:
preparing a piezoelectric substrate having a connection pad;
preparing a package having an electrode pad;
applying a connection member having a plurality of spherical metal particles and a solvent on the electrode pad;
mounting the piezoelectric substrate on the connection member; and
sintering and combining the plurality of spherical metal particles each other,
wherein the sintered and combined plurality of spherical metal particles have a porous structure, the step of sintering including evaporating a solvent to create the porosity.
5. The method for manufacturing a piezoelectric device according to claim 4 , wherein a heating temperature for sintering is within a range from 200 to 300 degrees centigrade.
6. The method for manufacturing a piezoelectric device according to claim 4 , wherein a particle diameter of the plurality of spherical metal particles is within a range from 0.2 μm to 0.5 μm.