Crystallization mask, crystallization method, and method of manufacturing thin film transistor including crystallized semiconductor
View Patent ↗A crystallization mask for laser illumination for converting amorphous silicon into polysilicon is provided, which includes: a plurality of transmissive areas having a plurality of first slits for adjusting energy of the laser illumination passing through the mask; and an opaque area.
1. A crystallization method comprising:
depositing a thin film of amorphous silicon on a substrate;
illuminating a first laser beam having a first energy onto local regions of the thin film to crystallize the thin film using a mask including first openings; and
illuminating a second laser beam having a second energy lower than the first energy onto the thin film to partly recrystallize the thin film using a mask including second openings, wherein a translucent film is disposed in the second openings.
2. The method of claim 1 , wherein the crystallization and the recrystallization comprise sequential lateral solidification.
3. The method of claim 2 , wherein the first openings and second openings are formed on a single mask.
4. The method of claim 3 , wherein the first slits and the second slits have different widths.
5. The method of claim 4 , wherein the first slits and the second slits are provided at different masks.
6. The method of claim 4 , wherein the first slits and the second slits are provided at a single mask.