Method of manufacturing an inkjet nozzle assembly for volumetric ink ejection
View Patent ↗A method is provided for manufacturing a printer nozzle. The method includes the step of depositing a metal layer upon a semi-conductor wafer. The metal layer defines a pair of protruding portions which each form a respective electrical contact. The method further includes the step of etching the metal layer through to the wafer to form a nozzle region and to electrically isolate the electrical contacts. In one embodiment, the nozzle region is defined by a circular wall.
1. A method for manufacturing a printer nozzle assembly, the method comprising the steps of:
depositing a metal layer upon a semi-conductor wafer, the metal layer defining a pair of protruding portions which each form a respective electrical contact; and
etching the metal layer through to the wafer to form a nozzle region and to electrically isolate the electrical contacts.
2. A method as claimed in claim 1 , wherein the step of etching the metal layer is carried out so that the nozzle region is defined by a circular wall.
3. A method as claimed in claim 1 , further comprising the steps of:
depositing a polytetrafluoroethylene (PTFE) layer on the metal layer and the exposed wafer in the nozzle region; and
etching the PTFE layer so as to define a pair of apertures each in register with a respective electrical contact.
4. A method as claimed in claim 3 , further comprising the steps of:
depositing another metal layer on the PTFE layer; and
etching the other metal layer through to the PTFE layer to define a heater element superposed with respect to the nozzle region and having a pair of ends which are each coupled to a respective electrical contact through a corresponding aperture.
5. A method as claimed in claim 4 , wherein said other metal layer is etched so that the heater element defines a plurality of serially interconnected serpentine portions.
6. A method as claimed in claim 4 , further comprising the steps of:
depositing another PTFE layer on the other metal layer and the PTFE layer; and
etching the other PTFE layer to define:
a plurality of radially extending bridging portions which terminate in a common rim, and
a plurality of actuators which each extend between a respective pair of adjacent bridging portions and each terminate in a free end proximal to the rim.
7. A method as claimed in claim 6 , further comprising the step of:
etching the wafer to define a nozzle chamber with respect to which the rim, bridging portions and actuators are superposed.
8. A method as claimed in claim 7 , further comprising the step of:
etching through the wafer to define an ink supply channel at an apex of the nozzle chamber.