Semiconductor probe and method of writing and reading information using the same
View Patent ↗A semiconductor probe and a method of writing and reading information using the same. The semiconductor probe includes a cantilever and a tip formed on an end portion of the cantilever to write or read information on or from a ferroelectric medium on a surface of which an electrode is formed. The tip includes a resistive region lightly doped with semiconductor impurities and a conductive region heavily doped with the semiconductor impurities. The cantilever includes an electrostatic force generation electrode formed on a bottom surface facing the medium. A contact force between the tip and the medium is adjusted by selectively applying a voltage between the electrode formed on the ferroelectric medium and the electrostatic force generation electrode.
1. A semiconductor probe comprising:
a cantilever comprising an electrostatic force generation electrode formed on a surface of the cantilever facing the medium; and
a tip formed on an end portion of the cantilever to write or read information on or from a ferroelectric medium which includes an electrode, the tip comprising a resistive region lightly doped with impurities and a conductive region heavily doped with impurities,
wherein the electrostatic force generation electrode is not electrically connected to the conductive region of the tip, and a contact force between the tip and the medium is adjusted by selectively applying a voltage between the electrode of the ferroelectric medium and the electrostatic force generation electrode of the cantilever so as that the contact force when the semiconductor probe writes information to the ferroelectric medium is stronger than the contact force when the semiconductor probe reads information from the ferroelectric medium.
2. The semiconductor probe of claim 1 , wherein the surface of the cantilever facing the medium is stepped.
3. A method of writing or reading information on or from a ferroelectric medium using a semiconductor probe comprising a cantilever having an electrostatic force generation electrode formed on a surface of the cantilever facing the ferroelectric medium which includes an electrode and a resistive tip having a lightly doped resistive region and a heavily doped conductive region that is not electrically connected to the electrostatic force generation electrode, the method comprising:
a writing operation in which a voltage between the electrode of the ferroelectric medium and the electrostatic force generation electrode of the cantilever is applied; and
a reading operation in which a voltage between the electrode of the ferroelectric medium and the electrostatic force generation electrode of the cantilever is not applied;
wherein a contact force between the ferroelectric medium and the resistive tip in the writing operation is stronger than the contact force between the ferroelectric medium and the resistive tip in the reading operation.
4. The method of claim 3 , wherein the application of the voltage between the electrode of the ferroelectric medium and the electrostatic force generation electrode of the cantilever starts before the application of the voltage between the electrode of the ferroelectric medium and the heavily doped conductive region of the resistive tip starts, and the application of the voltage between the electrode of the ferroelectric medium and the electrostatic force generation electrode of the cantilever is finished after the application of the voltage between the electrode of the ferroelectric medium and the heavily doped conductive region of the resistive tip is finished.