Organic EL device and its manufacture method
View Patent ↗A TFT is formed on a substrate. TFT has first and second regions as a source and a drain, a channel region between the first and second regions, and a gate electrode. An interlayer insulating film is formed on the substrate, covering the thin film transistor. A pixel electrode disposed on the interlayer insulating film is electrically connected to the first region of TFT via a via hole formed in the interlayer insulating film. A cover film covers the edge of the pixel electrode, exposes the inner area of the pixel electrode, and covers the surface of the interlayer insulating film in the area superposed upon the channel region of the thin film transistor to shield an ultraviolet ray. An organic light emission layer and an upper electrode are disposed on and above the pixel electrode.
1. A manufacture method for an organic EL device comprising steps of:
forming a thin film transistor on a principal surface of a substrate, the thin film transistor including first and second regions as a source and a drain, a channel region between the first and second regions and a gate electrode;
forming an interlayer insulating film over the substrate, the interlayer insulating film covering the thin film transistor;
forming a pixel electrode disposed on the interlayer insulating film, the pixel electrode being electrically connected to the first region of the thin film transistor;
forming a cover film disposed so as to overlap an entire outer periphery of the pixel electrode and covering an edge of the pixel electrode and an area having some width outside the outer periphery of the pixel electrode, exposing an inner area of a surface of the pixel electrode, the inner area other than the edge of the pixel electrode is not covered with the cover film, and covering a surface of the interlayer insulating film in an area superposed upon the channel region of the thin film transistor;
wherein the cover film has a transmissivity to ultraviolet rays of 30% or lower;
irradiating an ultraviolet ray upon the substrate from a principal surface side of the substrate, while a surface of the pixel electrode is exposed to an oxidizing atmosphere;
forming an organic light emission layer on the pixel electrode, the organic light emission layer containing organic light emission material; and
forming an upper electrode on the organic light emission layer.
2. A manufacture method for an organic EL device according to claim 1 , wherein the step of forming the cover film comprises steps of:
forming a resist film by coating photosensitive resist on a surface of the interlayer insulating film; and
partially exposing and developing the resist film to form the cover film made of the remaining resist film.
3. A manufacture method for an organic EL device according to claim 2 , wherein the pixel electrode is made of transparent conductive material which contains indium.
4. A manufacture method for an organic EL device according to claim 1 , wherein the pixel electrode is made of transparent conductive material which contains indium.