Organic thin film transistor, method of manufacturing the same, and organic light emitting display device having the same
View Patent ↗Provided is an organic thin film transistor that can prevents damage to source and drain electrodes when patterning an organic semiconductor layer, and a method of manufacturing an organic light emitting display device having the organic thin film transistor. The organic thin film transistor includes a source electrode and a drain electrode; an organic semiconductor layer that contacts the source and drain electrodes, and has an ashed surface except a channel area between the source and drain electrodes; a gate electrode insulated from the source electrode, the drain electrode, and the organic semiconductor layer; and a gate insulating film that insulates the gate electrode from the source electrode, the drain electrode, and the organic semiconductor layer.
1. An electronic device comprising an organic thin film transistor, the organic thin film transistor comprising:
a source electrode;
a drain electrode spaced apart from the source electrode;
an organic semiconductor layer that contacts the source and drain electrodes, the organic semiconductor layer comprising a channel portion positioned between the source and drain electrodes and a non-channel portion outside the channel portion;
a gate electrode insulated from the source electrode, the drain electrode, and the organic semiconductor layer; and
a gate insulating film that insulates the gate electrode from the source electrode, the drain electrode, and the organic semiconductor layer,
wherein the non-channel portion of the organic semiconductor layer comprises a first semiconductor layer and a second semiconductor layer, wherein the channel portion of the organic semiconductor layer comprises the first semiconductor layer, wherein the first semiconductor layer directly contacts the source and drain electrodes, wherein the first semiconductor layer comprises a first material, and wherein the second semiconductor layer comprises a second material which is substantially different from the first material, wherein the second semiconductor layer does not extend into the channel portion of the organic semiconductor layer between the source and drain electrodes.
2. The device of claim 1 , wherein the organic semiconductor layer covers the source electrode and the drain electrode.
3. The device of claim 1 , wherein the second material comprises a laser treated result of the first material.
4. The device of claim 1 , wherein the second material comprises an ashed result of the first material.
5. The device of claim 1 , wherein either or both of the source and drain electrodes are substantially free of cracks therein.
6. The device of claim 1 , wherein the non-channel portion of the semiconductor layer are produced by a method comprising:
forming a layer comprising a semiconductor material on either or both of the source and drain electrodes; and
applying a laser beam to the layer only to a certain depth thereof.
7. The device of claim 6 , wherein applying the laser beam to the layer comprising the semiconductor material substantially changes characteristics of the semiconductor material in a portion of the layer comprising the semiconductor material, thereby making the layer comprising the semiconductor material into two different sublayers.
8. The device of claim 1 , wherein the source and drain electrodes are formed of a noble metal.
9. The device of claim 1 , wherein the source and drain electrodes comprise one or more selected from the group consisting of Au, Ag, Pt, Ta, Pd and alloys of two or more of the foregoing.
10. The device of claim 1 , wherein the electronic device comprises an organic light emitting display device.
11. An electronic device comprising an organic thin film transistor, the organic thin film transistor comprising:
a source electrode;
a drain electrode spaced apart from the source electrode;
an organic semiconductor layer that contacts the source and drain electrodes, the organic semiconductor layer comprising a channel portion positioned between the source and drain electrodes and a non-channel portion outside the channel portion;
a gate electrode insulated from the source electrode, the drain electrode, and the organic semiconductor layer; and
a gate insulating film that insulates the gate electrode from the source electrode, the drain electrode, and the organic semiconductor layer,
wherein the channel portion of the organic semiconductor layer has a first thickness, wherein the non-channel portion of the organic semiconductor layer has a second thickness, and wherein the first thickness is substantially larger than the second thickness such that a lower surface of the organic semiconductor layer on top of the source and drain electrodes is substantially flat, and an upper surface of the organic semiconductor layer on top of the source and drain electrodes includes a step.
12. The device of claim 11 , wherein the second thickness is sufficiently thin to avoid a cross-talk therethrough between two neighboring thin film transistors.
13. The device of claim 11 , wherein the organic semiconductor layer covers the source electrode and the drain electrode.
14. The device of claim 11 , wherein either or both of the source and drain electrodes are substantially free of cracks therein.
15. The device of claim 11 , wherein the non-channel portion of the semiconductor layer are produced by a method comprising:
forming a layer comprising a semiconductor material on either or both of the source and drain electrodes; and
applying a laser beam to the layer only to a certain depth thereof.
16. The device of claim 15 , wherein applying the laser beam to the layer ablates a portion of the layer, thereby making the layer substantially thinner than the layer prior to applying the laser beam.
17. The device of claim 11 , wherein the source and drain electrodes are formed of a noble metal.
18. The device of claim 11 , wherein the source and drain electrodes comprise one or more selected from the group consisting of Au, Ag, Pt, Ta, Pd and alloys of two or more of the foregoing.
19. The device of claim 11 , wherein the electronic device comprises an organic light emitting display device.