Metal hydride fuel storage and method thereof
View Patent ↗Disclosed herein is a metal hydride fuel storage cartridge having integrated resistive heaters that can be used in conjunction with fuel cells such as MEMS-based fuel cells. The cartridge is fabricated using micromachining methods and thin/thick film materials synthesis techniques.
1. A method comprising:
forming a first substrate having a cavity;
positioning one or more resistive heaters in said cavity;
coating said cavity and said resistive heaters with one or more materials that are capable of (1) electrically isolating said resistive heaters and (2) conducting heat;
filling said cavity with a metal hydride material;
forming a second substrate having (1) an outlet comprising (a) a hydrogen permaselective membrane and (b) a porous material that forms a pressure relief structure and (2) one or more electrically isolating, heat conducting coatings; and
sealing said cavity by bonding said second substrate to said first substrate.
2. The method recited in claim 1 , wherein said forming of the cavity is accomplished by micromachining methods.
3. The method recited in claim 1 , wherein said filling of the cavity with a metal hydride material is accomplished by using film materials synthesis techniques.
4. The method recited in claim 1 , wherein said outlet is formed by (1) coating an opening in said second substrate with a permaselective membrane material using thin film deposition techniques and microfabrication and (2) forming a porous material over the membrane.
5. The method recited in claim 4 , wherein a porous material is formed over the membrane by using selective etching from the backside to form the membrane window or bonding of the membrane to the window.
6. The method recited in claim 1 , further comprising coupling said outlet to a microfluidic interconnect.
7. The method recited in claim 6 , wherein said coupling is accomplished by creating an O-ring around the porous membrane.
8. The method recited in claim 7 , wherein said O-ring is comprised of a ceramic material.
9. A method comprising:
forming a first substrate having a cavity;
positioning one or more resistive heaters in said cavity;
coating said cavity and said resistive heaters with one or more materials that are capable of (1) electrically isolating said resistive heaters and (2) conducting heat;
adding a metal hydride material to said cavity;
coupling a second substrate to said first substrate, said second substrate having (1) an outlet comprising a hydrogen permaselective membrane.
10. The method recited in claim 9 , further comprising coupling said outlet to a microfluidic interconnect or other gas distribution system.
11. The method recited in claim 9 , wherein the second substrate includes a porous material that forms a pressure relief structure.
12. The method recited in claim 11 , wherein said porous material is formed over the membrane by using selective etching from the backside to form a membrane window or bonding of the membrane to the window.