Thin film transistor
View Patent ↗A thin film transistor is disclosed comprising a substrate, a dielectric layer, and a semiconductor layer. The semiconductor layer, which is crystalline zinc oxide preferentially oriented with the c-axis perpendicular to the plane of the dielectric layer or substrate, is prepared by liquid depositing a zinc oxide nanodisk composition. The thin film transistor has good mobility and on/off ratio.
1. A thin film transistor, comprising:
a substrate:
a gate electrode, a source electrode, and a drain electrode;
a dielectric layer; and
a semiconductor layer;
wherein the semiconductor layer comprises zinc oxide nanodisks oriented with their c-axis perpendicular to the dielectric layer or the substrate; and
wherein the semiconductor layer is deposited upon a surface of the substrate, and the substrate has at least one type of polar functional group on the surface.
2. The thin film transistor of claim 1 , wherein the polar functional group is selected from the group consisting of —OH, —NH 2 , —COOH, —SO 3 H, and —P(═O)(OH) 2 .
3. A thin film transistor, comprising:
a substrate;
a gate electrode, a source electrode, and a drain electrode;
a dielectric layer; and
a semiconductor layer;
wherein the semiconductor layer comprises zinc oxide nanodisks oriented with their c-axis perpendicular to the dielectric layer or the substrate; and
wherein the semiconductor layer is deposited upon a surface of the dielectric layer and the dielectric layer has at east one type of polar functional group on the surface.
4. The thin film transistor of claim 3 , wherein the polar functional group is selected from the group consisting of —OH, —NH 2 , —COOH, —SO 3 H, and —P(═O)(OH) 2 .
5. A thin film transistor, comprising:
a substrate;
a gate electrode, a source electrode, and a drain electrode;
a dielectric layer; and
a semiconductor layer;
wherein the semiconductor layer comprises zinc oxide nanodisks oriented with their c-axis perpendicular to the dielectric layer or the substrate; and wherein the substrate is a polymer film or sheet comprising a polyester, polycarbonate, or polyimide.
6. A thin film transistor, comprising:
a substrate;
a gate electrode, a source electrode, and a drain electrode;
a dielectric layer; and
a semiconductor layer;
wherein the semiconductor layer comprises zinc oxide nanodisks oriented with their c-axis perpendicular to the dielectric layer or the substrate; and wherein the substrate has a thickness of from about 10 micrometers to about 10 millimeters.
7. A thin film transistor, comprising:
a substrate;
a gate electrode, a source electrode, and a drain electrode;
a dielectric layer; and
a semiconductor layer;
wherein the semiconductor layer comprises zinc oxide nanodisks oriented with their c-axis perpendicular to the dielectric layer or the substrate; and wherein the semiconductor layer further comprises metal nanoparticles or metal oxide nanoparticles.