IP Library Granted Patent US 7,511,343
Granted Patent B2
US 7,511,343 · App. 11/546,857 · Granted Mar 31, 2009

Thin film transistor

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Quick Facts
Patent No.
US 7,511,343
App. No.
11/546,857
Granted
Mar 31, 2009
Kind
B2
Abstract

A thin film transistor is disclosed comprising a substrate, a dielectric layer, and a semiconductor layer. The semiconductor layer, which is crystalline zinc oxide preferentially oriented with the c-axis perpendicular to the plane of the dielectric layer or substrate, is prepared by liquid depositing a zinc oxide nanodisk composition. The thin film transistor has good mobility and on/off ratio.

Claims (34)

1. A thin film transistor, comprising:

a substrate:

a gate electrode, a source electrode, and a drain electrode;

a dielectric layer; and

a semiconductor layer;

wherein the semiconductor layer comprises zinc oxide nanodisks oriented with their c-axis perpendicular to the dielectric layer or the substrate; and

wherein the semiconductor layer is deposited upon a surface of the substrate, and the substrate has at least one type of polar functional group on the surface.

2. The thin film transistor of claim 1 , wherein the polar functional group is selected from the group consisting of —OH, —NH 2 , —COOH, —SO 3 H, and —P(═O)(OH) 2 .

3. A thin film transistor, comprising:

a substrate;

a gate electrode, a source electrode, and a drain electrode;

a dielectric layer; and

a semiconductor layer;

wherein the semiconductor layer comprises zinc oxide nanodisks oriented with their c-axis perpendicular to the dielectric layer or the substrate; and

wherein the semiconductor layer is deposited upon a surface of the dielectric layer and the dielectric layer has at east one type of polar functional group on the surface.

4. The thin film transistor of claim 3 , wherein the polar functional group is selected from the group consisting of —OH, —NH 2 , —COOH, —SO 3 H, and —P(═O)(OH) 2 .

5. A thin film transistor, comprising:

a substrate;

a gate electrode, a source electrode, and a drain electrode;

a dielectric layer; and

a semiconductor layer;

wherein the semiconductor layer comprises zinc oxide nanodisks oriented with their c-axis perpendicular to the dielectric layer or the substrate; and wherein the substrate is a polymer film or sheet comprising a polyester, polycarbonate, or polyimide.

6. A thin film transistor, comprising:

a substrate;

a gate electrode, a source electrode, and a drain electrode;

a dielectric layer; and

a semiconductor layer;

wherein the semiconductor layer comprises zinc oxide nanodisks oriented with their c-axis perpendicular to the dielectric layer or the substrate; and wherein the substrate has a thickness of from about 10 micrometers to about 10 millimeters.

7. A thin film transistor, comprising:

a substrate;

a gate electrode, a source electrode, and a drain electrode;

a dielectric layer; and

a semiconductor layer;

wherein the semiconductor layer comprises zinc oxide nanodisks oriented with their c-axis perpendicular to the dielectric layer or the substrate; and wherein the semiconductor layer further comprises metal nanoparticles or metal oxide nanoparticles.

Assignments (10)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 6, 2025
From: XEROX CORPORATION
To: GENESEE VALLEY INNOVATIONS, LLC
Reel/Frame 073842/0479 →
SECOND LIEN NOTES PATENT SECURITY AGREEMENT Recorded Jul 2, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 071785/0550 →
FIRST LIEN NOTES PATENT SECURITY AGREEMENT Recorded Apr 11, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 070824/0001 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT RF 064760/0389 Recorded Feb 13, 2024
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: XEROX CORPORATION
Reel/Frame 068261/0001 →
SECURITY INTEREST Recorded Feb 13, 2024
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 066741/0001 →
SECURITY INTEREST Recorded Nov 20, 2023
From: XEROX CORPORATION
To: JEFFERIES FINANCE LLC, AS COLLATERAL AGENT
Reel/Frame 065628/0019 →
SECURITY INTEREST Recorded Jun 22, 2023
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 064760/0389 →
RELEASE OF SECURITY INTEREST IN PATENTS AT R/F 062740/0214 Recorded May 18, 2023
From: CITIBANK, N.A., AS AGENT
To: XEROX CORPORATION
Reel/Frame 063694/0122 →
SECURITY INTEREST Recorded Nov 10, 2022
From: XEROX CORPORATION
To: CITIBANK, N.A., AS AGENT
Reel/Frame 062740/0214 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 12, 2006
From: LI, YUNING; ONG, BENG S.
To: XEROX CORPORATION
Reel/Frame 018410/0778 →