Thin film transistor array panel
View Patent ↗The present invention relates to an OLED display and a manufacturing method thereof, including a substrate, a control electrode formed on the substrate, a polysilicon semiconductor formed on the control electrode, a data line including an input electrode at least partially overlapping the polysilicon semiconductor and an output electrode facing the input electrode, an insulating layer covering the data line and the output electrode and having a contact hole, a gate line connected to the control electrode through the contact hole, and a pixel electrode connected to the output electrode.
1. A thin film transistor array panel comprising:
a substrate;
a control electrode formed on the substrate;
a polysilicon semiconductor formed on the control electrode;
a data line, an input electrode at least partially overlapping the polysilicon semiconductor and connected to the data line, and an output electrode facing the input electrode;
an insulating layer covering the data line and the output electrode and having a contact hole;
a gate line connected to the control electrode through the contact hole; and
a pixel electrode connected to the output electrode.
2. The thin film transistor array panel of claim 1 , wherein the control electrode and the gate line comprise different materials.
3. The thin film transistor array panel of claim 2 , wherein the control electrode comprises a refractory conductor, and the gate line comprises a conductor having low resistivity.
4. The thin film transistor array panel of claim 3 , wherein the control electrode comprises at least one of Cr, Mo, W, Ti, Ta, and alloys comprising at least one of the foregoing metals.
5. The thin film transistor array panel of claim 3 , wherein the gate line comprises at least one of Al, Cu, Ag, and alloys comprising at least one of the foregoing metals.
6. The thin film transistor array panel of claim 1 , further comprising a protection member covering the gate line.
7. The thin film transistor array panel of claim 6 , wherein the protection member comprises the same material as the pixel electrode.
8. The thin film transistor array panel of claim 1 , further comprising a subsidiary member disposed between the output electrode and the pixel electrode.
9. The thin film transistor array panel of claim 8 , wherein the subsidiary member comprises the same material as the gate line.
10. The thin film transistor array panel of claim 1 , further comprising ohmic contacts disposed between the polysilicon semiconductor and the input electrode and between the polysilicon semiconductor and the output electrode, respectively.