Fabricating method of an active-matrix organic electroluminescent display panel
A method for fabricating an active-matrix organic electroluminescent (OEL) display panel is described. A transparent conductive layer is formed on a substrate as a common anode for all organic light emitting diodes (OLED), and a passivation layer is formed on the transparent conductive layer. Thin film transistors are formed on the passivation layer to serve as an active matrix, and openings are formed in the passivation layer to expose portions of the transparent conductive layer and define pixel regions. An organic function layer is formed in each opening, and a metal electrode layer is formed on each organic function layer, wherein the metal electrode layer is electrically connected with the drain of the corresponding thin film transistor.
1. A method for fabricating an active-matrix organic electroluminescent (OEL) display panel, comprising:
forming a transparent conductive layer on a substrate;
forming a first passivation layer on the transparent conductive layer;
forming a plurality of gate electrodes on the first passivation layer;
forming a gate insulator covering the plurality of gate electrodes;
forming a plurality of openings in the gate insulator and the first passivation layer to expose portions of the transparent conductive layer;
forming a channel layer on the gate insulator over each of the plurality of gate electrodes;
forming a source and a drain on the channel layer;
forming an organic function layer in the plurality of openings; and
forming a metal electrode layer on the organic function layer, the metal electrode layer being electrically connected to a corresponding drain.
2. The method for fabricating an active-matrix OEL display panel according to claim 1 , wherein each organic function layer is formed by sequentially stacking a hole injection layer, a hole transporting layer, an emitting layer and an electron transporting layer.
3. The method for fabricating an active-matrix OEL display panel according to claim 1 , further comprising forming a second passivation layer on each thin film transistor after the thin film transistors are formed and before the metal electrode layer is formed, the second passivation layer exposing at least a portion of the drain of the corresponding thin film transistor.
4. The method for fabricating an active-matrix OEL display panel according to claim 1 , wherein the transparent conductive layer includes indium tin oxide (ITO) or indium zinc oxide (IZO).
5. The method for fabricating an active-matrix OEL display panel according to claim 1 , wherein each metal electrode layer includes a LiF/Al composite layer.
6. The method for fabricating an active-matrix OEL display panel according to claim 5 , wherein the aluminum layer is formed with a sputtering process.
7. A method for fabricating an active-matrix organic electroluminescent (OEL) display panel, comprising:
forming a transparent conductive layer on a substrate;
forming a passivation layer on the transparent conductive layer;
forming a plurality of thin film transistors on the passivation layer;
forming a plurality of openings in the passivation layer to expose portions of the transparent conductive layer;
forming an organic function layer in the plurality of openings; and
forming a metal electrode layer on the organic function layer, the metal electrode layer being electrically connected to a drain of a corresponding thin film transistor.
8. The method for fabricating an active-matrix OEL display panel according to claim 7 , wherein forming the thin film transistors on the passivation layer comprises:
forming a plurality of gate electrodes on the passivation layer;
forming a gate insulator covering the gate electrodes;
forming a channel layer on the gate insulator of each gate electrode; and
forming a source and a drain on each channel layer.
9. The method for fabricating an active-matrix OEL display panel according to claim 8 , wherein the openings are formed in the gate insulator and the passivation layer to expose portions of the transparent conductive layer.