Growth of silicon nanodots having a metallic coating using gaseous precursors
View Patent ↗A technique to form metallic nanodots in a two-step process involving: (1) reacting a silicon-containing gas precursor (e.g., silane) to form silicon nuclei over a dielectric film layer; and (2) using a metal precursor to form metal nanodots where the metal nanodots use the silicon nuclei from step (1) as nucleation points. Thus, the original silicon nuclei are a core material for a later metallic encapsulation step. Metallic nanodots have applications in devices such as flash memory transistors.
1. A method of forming metallic nanodots, the method comprising:
forming a dielectric film layer on a surface of a substrate;
forming a plurality of silicon nucleation sites on an exposed surface of the dielectric film layer, the plurality of silicon nucleation sites being formed by steps including:
(i) introducing a silicon-containing precursor gas into the reactor chamber, and
(ii) disassociating at least a portion of the silicon-containing precursor gas; and encapsulating the plurality of silicon nucleation sites with a metal coating, the metal coating being selectively formed substantially around only the silicon nucleation sites by steps including:
(i) introducing a metal-containing precursor gas into the reactor chamber, and
(ii) dissociating at least a portion of the metal-containing precursor gas.
2. The method of claim 1 wherein the silicon-containing precursor gas is selected to be silane.
3. The method of claim 1 wherein the silicon-containing precursor gas is selected to be disilane.
4. The method of claim 1 wherein the metal-containing precursor gas is selected to be titanium tetrachloride.
5. The method of claim 1 wherein the metal-containing precursor gas is selected to be tungsten hexafluoride.
6. The method of claim 1 wherein a temperature of the substrate is elevated to a range of about 400° C. to 1000° C.
7. The method of claim 1 wherein a pressure within the chamber is reduced to a range of about 1 Torr to 300 Torr.
8. The method of claim 1 , further comprising selecting the dielectric film layer to be silicon dioxide.
9. A method of forming metallic nanodots, the method comprising:
forming a silicon dioxide film layer on a surface of a silicon substrate to a thickness selected to act as a tunneling layer;
forming a plurality of silicon nucleation sites on an exposed surface of the silicon dioxide film layer, the silicon nucleation sites being formed by steps including:
(i) introducing a silicon-containing precursor gas into the reactor chamber, and
(ii) disassociating at least a portion of the silicon-containing precursor gas; and encapsulating the plurality of silicon nucleation sites with a metal coating, the metal coating being selectively formed substantially around only the silicon nucleation sites by steps including:
(i) introducing a metal-containing precursor gas into the reactor chamber, and
(ii) dissociating at least a portion of the metal-containing precursor gas.
10. The method of claim 9 wherein the silicon-containing precursor gas is selected to be silane.
11. The method of claim 9 wherein the silicon-containing precursor gas is selected to be disilane.
12. The method of claim 9 wherein the metal-containing precursor gas is selected to be titanium tetrachloride.
13. The method of claim 9 wherein the metal-containing precursor gas is selected to be tungsten hexafluoride.
14. A method of forming a flash memory transistor, the method comprising:
forming a silicon dioxide film layer on a surface of a substrate to a thickness selected to act as a tunneling layer;
forming a plurality of silicon nucleation sites on an exposed surface of the silicon dioxide film layer, the silicon nucleation sites being formed by steps including:
(i) introducing a silicon-containing precursor gas into the reactor chamber, and
(ii) disassociating at least a portion of the silicon-containing precursor gas; encapsulating the plurality of silicon nucleation sites with a metal coating thus forming a plurality of metallic nanodots, the metal coating being selectively formed substantially around only the silicon nucleation sites by steps including:
(i) introducing a metal-containing precursor gas into the reactor chamber, and
(ii) dissociating at least a portion of the metal-containing precursor gas;
forming a dielectric layer over the plurality of metallic nanodots; and
forming a gate electrode over the dielectric layer.
15. The method of claim 14 wherein the silicon containing precursor gas is selected to be silane.
16. The method of claim 14 wherein the silicon containing precursor gas is selected to be disilane.
17. The method of claim 14 wherein the metal-containing precursor gas is selected to be titanium tetrachloride.
18. The method of claim 14 wherein the metal-containing precursor gas is selected to be tungsten hexafluoride.
19. The method of claim 14 wherein material selected for the gate electrode is polysilicon.