Semiconductor device and method for manufacturing same

1. A semiconductor device comprising:

an insulating film having a recess therein;

an electric conductor formed inside the recess;

a silicon oxide insulating film on the insulating film and the electric conductor;

a barrier film composed of manganese silicate provided at an interface between an inner surface of said recess and said conductor; and

a manganese silicate film formed directly on top of an upper surface of said electric conductor between said electric conductor and said silicon oxide insulating film,

wherein,

said electric conductor includes manganese,

said barrier film provided at an interface between the inner surface of said recess and said conductor is contiguous to said manganese silicate film formed on the upper surface of said conductor, and

said manganese silicate film is a product of a reaction between the manganese in said electric conductor and said silicon oxide insulating film.