Semiconductor laser device which is capable of stably emitting short-wavelength laser light
View Patent ↗A semiconductor laser device according to the present invention includes: a semiconductor laser chip 1 for emitting laser light; a stem 3, 4 for supporting the semiconductor laser chip; a plurality of terminal electrodes, inserted in throughholes provided in the stem 3, 4 , for supplying power to the semiconductor laser chip; and a cap 5 having an optical window 6 which transmits laser light and being affixed to the stem 3, 4 so as to cover the semiconductor laser chip 1 . Between the stem 3, 4 and the terminal electrodes 7 , this device includes insulation glass 8 , which does not release silicon fluoride gas when heated to a temperature of no less than 700° C. and no more than 850° C.
1. A semiconductor laser device comprising:
a semiconductor laser chip for emitting laser light;
a stem for supporting the semiconductor laser chip;
a plurality of terminal electrodes, inserted in throughholes provided in the stem, for supplying power to the semiconductor laser chip;
a cap having an optical window which transmits laser light and being affixed to the stem so as to cover the semiconductor laser chip; and
insulation glass provided between the stem and the terminal electrodes, wherein, in the insulation glass, a concentration of silicon fluoride at a surface which is in contact with the ambient gas is 1/10 or less of a concentration of silicon fluoride in the interior of the insulation glass, and wherein,
a total amount of silicon fluoride gas which is released when the insulation glass is heated to a temperature of no less than 700° C. and no more than 850° C. is equal to or less than 1.0 μg.
2. The semiconductor laser device of claim 1 , wherein an interval between an inner peripheral edge of the cap and an outer peripheral surface of the insulation glass is equal to or less than 50 μm.
3. The semiconductor laser device of claim 1 , wherein a wavelength of the laser light is equal to or less than 500 nm.
4. The semiconductor laser device of claim 1 , wherein the ambient gas is nitrogen gas and/or inert gas.
5. The semiconductor laser device of claim 1 , wherein the ambient gas contains oxygen gas.
6. An optical disk apparatus comprising:
the semiconductor laser device of claim 1 ; and
an optical system for converging laser light which is emitted from the semiconductor laser device onto an optical disk.
7. The optical disk apparatus of claim 6 , wherein, in any region which is irradiated with the laser light, no element is provided that is formed of a material containing a substance which undergoes a photochemical reaction responsive to laser light.
8. A method for producing a semiconductor laser device including: a semiconductor laser chip for emitting laser light; a stem for supporting the semiconductor laser chip; a plurality of terminal electrodes, inserted in throughholes provided in the stem, for supplying power to the semiconductor laser chip; and a cap having an optical window which transmits laser light and being affixed to the stem so as to cover the semiconductor laser chip, comprising:
step (A) of insulating the terminal electrodes from the stem with insulation glass wherein, in the insulation glass, a concentration of silicon fluoride at a surface which is in contact with the ambient gas is 1/10 or less of a concentration of silicon fluoride in the interior of the insulation glass, and wherein the insulation glass does not release silicon fluoride gas when heated to a temperature of no less than 700° C. and no more than 850° C.; and
step (B) of affixing the cap to the stem.
9. The production method of claim 8 , wherein, between step (A) and step (B), a step of washing a surface of the stem and the cap with hexane is performed.
10. The production method of claim 8 , wherein, between step (A) and step (B), a step of irradiating a surface of the stem and the cap with light having a wavelength equal to or less than 500 nm is performed.