Integrated circuit comprising a capacitor with metal electrodes and process for fabricating such a capacitor
View Patent ↗An integrated circuit (IC) includes at least one capacitor with metal electrodes. At least one of the electrodes ( 10 or 30 ) is formed from at least surface-silicided hemispherical grain silicon or silicon alloy. A fabrication process for obtaining such a capacitor with silicided metal electrodes is also provided.
1. A process for fabricating a capacitor within an integrated circuit, comprising:
production of a first electrode, of a dielectric and of a second electrode, wherein the production of the first electrode comprises
formation of a layer of hemispherical grain silicon or hemispherical grain silicon alloy, and
complete silicidization of the layer of hemispherical grain silicon or hemispherical grain silicon alloy, “wherein silicide resulting from the silicidization directly contacts the dielectric, and wherein the dielectric is between the first electrode and the second electrode”.
2. The process according to claim 1 , in which the production of the second electrode is similar to that of the first electrode.
3. The process according to claim 1 , in which the production of the second electrode comprises a deposition of metal.
4. The process according to claim 1 , in which the production of the second electrode is similar to that of the first electrode.
5. The process according to claim 1 , in which the production of the second electrode comprises a deposition of metal.
6. The process according to claim 1 , in which the complete silicidization of the layer of hemispherical grain silicon or hemispherical grain silicon alloy comprises
depositing a metal layer on the layer of hemispherical grain silicon or hemispherical grain silicon alloy,
carrying out an annealing operation to cause the metal of the metal layer to react with silicon of the layer of hemispherical grain silicon or hemispherical grain silicon alloy, thereby forming a metal silicide, and
selectively removing excess metal of the metal layer that has not reacted with the silicon of the layer of hemispherical grain silicon or hemispherical grain silicon alloy.
7. The process according to claim 6 , in which the depositing the metal layer on the layer of hemispherical grain silicon or hemispherical grain silicon alloy is done by plasma vapour deposition.
8. The process according to claim 6 , in which the metal of the metal layer is cobalt.
9. The process according to claim 6 , in which the metal of the metal layer is tungsten.
10. The process according to claim 6 , in which the metal of the metal layer is nickel.
11. The process according to claim 10 , in which the annealing operation is carried out at a temperature of approximately 450° C.
12. A process for fabricating a capacitor within an integrated circuit, comprising:
providing a semiconductor substrate;
forming a trench in the substrate, the trench having sidewalls and a bottom;
production of a first electrode, of a dielectric and of a second electrode in the trench, wherein the production of the first electrode comprises
depositing a layer of hemispherical grain silicon or hemispherical grain silicon alloy on the sidewalls of the trench and on the bottom of the trench, and
complete silicidization of the layer of hemispherical grain silicon or hemispherical grain silicon alloy on the sidewalls of the trench “and on the bottom of the trench wherein silicide resulting from the silicidization directly contacts the dielectric. ”
13. The process according to claim 12 , in which the silicidization of at least the surface of the layer of hemispherical grain silicon or hemispherical grain silicon alloy comprises
depositing a nickel layer on the layer of hemispherical grain silicon or hemispherical grain silicon alloy,
carrying out an annealing operation to cause the nickel of the nickel layer to react with silicon of the layer of hemispherical grain silicon or hemispherical grain silicon alloy, thereby forming a nickel silicide, and
selectively removing excess nickel of the nickel layer that has not reacted with the silicon of the layer of hemispherical grain silicon or hemispherical grain silicon alloy.
14. The process according to claim 13 , in which the depositing the nickel layer on the layer of hemispherical grain silicon or hemispherical grain silicon alloy is done by plasma vapour deposition.