Transparent conductor, transparent electrode, solar cell, light emitting device and display panel
View Patent ↗With regard to a substrate for a transparent electrode and transparent conductive thin film each having transparency and conductivity, a transparent metal material and transparent electrode are provided which are capable of being stably supplied and are composed of raw materials with superior chemical resistance. When a metal oxide layer ( 12 ) composed of an anatase type crystal structure is provided on a substrate ( 11 ) to constitute the metal oxide layer ( 12 ) by M:TiO 2 , low resistivity is achieved while internal transmittance is maintained. M:TiO 2 obtained by substituting other atoms (Nb, Ta, Mo, As, Sb, or W) for Ti of the anatase type TiO 2 enable maintenance of transparency and remarkably improvement of electric conductivity.
1. A transparent conductor comprising a metal oxide which is M:TiO 2 comprising an anatase type crystal structure, wherein M is selected from the group consisting of Nb and Ta and the transparent conductor has an electric resistivity of 10 −3 Ωcm or less.
2. A transparent conductor according to claim 1 , wherein the metal oxide is provided on a perovskite type crystal substrate.
3. A transparent electrode comprising the transparent conductor according to claim 1 .
4. A transparent conductor according to claim 1 , wherein the metal oxide is disposed on a GaN compound film.
5. A transparent conductor according to claim 1 , wherein the metal oxide is disposed on an oriented film which is disposed on a substrate.
6. A transparent conductor according to claim 5 , wherein the oriented film is at least one selected from the group consisting of ZnO, ZrO 2 , SrTiO 3 , MgO, LaAlO 3 , CeO 2 , ZrO 2 , and Al 2 O 3 films.
7. A transparent conductor according to claim 5 , wherein the oriented film is a ZnO film.
8. A transparent conductor according to claim 1 , wherein a d electron imparts electric conductivity.
9. A solar cell comprising the transparent conductor according to claim 1 .
10. A light emitting device comprising the transparent conductor according to claim 1 .
11. A display panel comprising the transparent conductor according to claim 1 .