Manufacturing method of semiconductor devices
View Patent ↗In a method of manufacturing semiconductor chips by dicing individual semiconductor devices from a semiconductor wafer, masks formed for plasma dicing in which a semiconductor wafer is divided by conducting plasma etching are removed by mechanical grinding using a grinding head. Accordingly, by removing the masks for plasma dicing using mechanical grinding, generation of reaction products is prevented when removing the masks, so that the dicing can be conducted without causing quality deterioration due to the accumulated particles.
1. A method of manufacturing semiconductor chips by dicing individual semiconductor devices from a semiconductor wafer in which the semiconductor devices are formed respectively in plural areas partitioned by street lines, comprising the steps of:
a protective tape pasting step of pasting a protective tape, capable of being peeled off, on a semiconductor device forming face of a semiconductor wafer;
a back face grinding step of grinding a back face opposite to the face of the semiconductor wafer on which the protective tape is pasted so as to thin the semiconductor wafer;
a mask forming step of forming masks covering the plural areas on the back face of the semiconductor wafer after the back face grinding step;
a plasma dicing step of dicing the semiconductor wafer into plural semiconductor chips each of which corresponds to an individual semiconductor device by generating plasma from a side of the semiconductor wafer on which the masks are formed to remove a portion of the semiconductor wafer which is not covered with the masks;
a mask removing step of removing the masks by grinding the back face on which the masks are formed after the plasma dicing step, wherein the semiconductor chips are partially grinded along with the masks during removing the masks to form damaged layers;
a damaged layer removing step of removing the damaged layers formed by partially grinding the semiconductor chips along with the masks in the mask removing step; and
a tape releasing step of releasing the protective tape from the diced semiconductor chips,
wherein the damaged layers formed on the back face are removed by plasma etching in the damaged layer removing step.