Thin film memory device having a variable resistance
View Patent ↗A thin film storage device includes a first electrode ( 3 ), a first variable resistance thin film ( 2 ), and a second electrode ( 1 ). The first electrode ( 3 ) is formed over a surface of a substrate ( 4 ). The first variable resistance thin film ( 2 ) is formed over a surface of the first electrode ( 3 ). The second electrode ( 1 ) is formed over a surface of the first variable resistance thin film ( 2 ). The first variable resistance thin film ( 2 ) comprises a material whose resistance in a bulk state changes in accordance with at least one of a lattice strain and a change of charge-order.
1. A thin film storage device, comprising:
a first electrode formed over a surface of a substrate;
a variable resistance thin film formed by a material whose resistance changes in accordance with a voltage pulse and having a spinel structure formed over a surface of the first electrode;
a second electrode formed over a surface of the variable resistance thin film; and
an electric circuit configured to apply a voltage pulse to the first and second electrodes,
wherein a resistance in a bulk state of the material which constitutes the variable resistance thin film changes in accordance with a lattice strain generated by a Jahn-Teller effect,
a thickness of the variable resistance thin film is equal to or less than 200 nm, and
said first electrode directly contacts a first surface of said variable resistance thin film, and said second electrode directly contacts a second surface of said variable resistance thin film.
2. The thin film storage device of claim 1 , wherein the material does not contain an alkali metal or an alkaline-earth metal.
3. The thin film storage device of claim 1 , wherein the variable resistance thin film is constituted by a single phase.
4. The thin film storage device of claim 1 , wherein the variable resistance thin film comprises a plurality of resistance phases.
5. The thin film storage device of claim 1 , wherein the variable resistance thin film is a single layer film.