Electroactive polymers for lithography
View Patent ↗Systems and methods for lithography include actuating an electroactive polymer member to position mask and/or substrate.
1. A lithographic method, comprising:
positioning a mask proximate to a substrate; and
shifting the relative position of the mask and the substrate by actuating an electroactive polymer member.
2. The method of claim 1 , further comprising monitoring distances between the mask and the substrate at a plurality of locations, wherein the electroactive polymer member comprises a plurality of separably actuatable active regions, and wherein actuating the electroactive polymer member comprises separately actuating a subset of the separably actuatable active regions in response to the monitored distances.
3. The method of claim 1 , further comprising maintaining a selected distance between the mask and the substrate by using a monitored distance as a feedback signal to adjust a degree of actuation of the electroactive polymer member.
4. The method of claim 1 , wherein shifting the relative position of the mask and the substrate comprises bringing the mask and the substrate into contact.
5. The method of claim 4 , further comprising using a monitored contact force as a feedback signal to adjust a degree of actuation of the electroactive polymer member.
6. The method of claim 4 , further comprising monitoring contact forces at a plurality of locations between the mask and the substrate, wherein the electroactive polymer member comprises a plurality of separably actuatable active regions, and wherein actuating the electroactive polymer member comprises separately actuating a subset of the separably actuatable active regions in response to the monitored contact forces.
7. The method of claim 1 , wherein the electroactive polymer member comprises a plurality of separably actuatable active regions.
8. The method of claim 1 , wherein the change of position or shape of the electroactive polymer member flattens the substrate.
9. The method of claim 8 , further comprising measuring flatness of the substrate, wherein the electroactive polymer member comprises a plurality of separably actuatable active regions, and wherein actuating the electroactive polymer member comprises separately actuating a subset of the separably actuatable active regions in response to the measured flatness of the substrate.
10. The method of claim 1 , wherein the change of position or shape of the electroactive polymer member flattens the mask.
11. The method of claim 10 , further comprising measuring flatness of the mask, wherein the electroactive polymer member comprises a plurality of separably actuatable active regions, and wherein actuating the electroactive polymer member comprises separately actuating a subset of the separably actuatable active regions in response to the measured flatness of the mask.
12. The method of claim 1 , further comprising exposing the substrate to an energy flux through the mask.
13. The method of claim 12 , wherein the substrate is coated with a resist composition, and wherein the energy flux causes a chemical change in the resist composition.
14. The method of claim 1 , further comprising exposing the substrate to an energy flux from the mask.
15. The method of claim 14 , wherein exposing the substrate to the energy flux from the mask comprises applying a voltage to the mask.
16. The method of claim 14 , wherein exposing the substrate to the energy flux from the mask comprises causing the mask to emit light.
17. The method of claim 1 , further comprising causing a physical effect on a surface of the substrate by contact with the mask.
18. The method of claim 17 , wherein chemical composition of the surface is changed by contact with the mask.
19. A method of positioning a mask, comprising:
applying a force with an electroactive polymer.
20. The method of claim 19 , wherein applying a force comprises applying a force to a mask moving mechanism.
21. The method of claim 19 , wherein applying a force comprises deforming the mask.
22. A method of exposing a substrate, comprising:
shifting the relative position of a mask and the substrate by actuating an electroactive polymer member; and
exposing the substrate to an energy flux through the mask.
23. A method of exposing a substrate, comprising:
shifting the relative position of a mask and the substrate by actuating an electroactive polymer member; and
exposing the substrate to an energy flux from the mask.
24. The method of claim 23 , wherein exposing the substrate to an energy flux from the mask comprises applying a voltage to the mask.
25. The method of claim 23 , wherein exposing the substrate to an energy flux from the mask comprises inducing the mask to emit light.