Fluorescent X-ray analysis method and device
View Patent ↗In a fluorescent X-ray analysis method, a sample ( 1 ) is set on a sample stage ( 2 ) on an upper side of an X-ray irradiation chamber ( 7 ) and a sample cover ( 6 ) is closed from the upper part of the sample ( 1 ) to surround the sample ( 1 ), and then, a lower plane of the sample ( 1 ) is irradiated with X-ray for analysis. When the sample ( 1 ) is set on the sample stage ( 2 ) and the sample cover ( 6 ) is closed, a cover detecting means ( 8 ) detects that the sample cover ( 6 ) is closed and X-ray is automatically projected from an X-ray source ( 3 ) to start analysis.
1. A fluorescent X-ray analysis method in which a sample covered by a sample cover openably and closeably attached to a sample stage is irradiated with X-rays, and the fluorescent X-rays emitted from the sample are detected, comprising:
determining whether the sample cover is open or closed;
determining whether or not the sample has been placed on the sample stage;
when the sample cover is closed, starting the X-ray irradiation of the sample; and
even when the sample cover is closed, not irradiating the sample with X-rays if the sample has not been placed on the sample stage.
2. A fluorescent X-ray analysis device, comprising:
a sample stage upon which a sample can be placed;
a sample cover openably and closeably attached to the sample stage;
an X-ray irradiation unit for irradiating the sample with X-rays;
a fluorescent X-ray detection unit for detecting fluorescent X-rays from the sample;
a sample cover open/closed detection unit for detecting whether the sample cover is open or closed;
a sample recognition unit for determining whether or not the sample has been placed on the sample stage; and
an X-ray irradiation starting unit for starting the X-ray irradiation of the sample when the sample cover is closed, or, even when the sample cover is closed, not irradiating the sample with X-rays if the sample has not been put in place, on the basis of a signal from the sample cover open/closed detection unit and the sample recognition unit.