Organic light emitting display device and method of fabricating the same
An organic light emitting display device including a first electrode that has a three layer structure, improved adhesion, and is simple to fabricate, and a method of fabricating the same, are provided. The organic light emitting display device includes: a substrate; a first electrode disposed on the substrate, the first electrode comprising a first metal layer including Mo or an Mo alloy, a second metal layer disposed on the first metal layer and including Ag or an Ag alloy, and a third metal layer disposed on the second metal layer and including a transparent conductive oxide layer; an organic layer disposed on the first electrode and including an organic emission layer; and a second electrode disposed on the organic layer.
1. An organic light emitting display device, comprising:
a substrate;
a first electrode disposed on the substrate, the first electrode comprising a first metal layer including molybdenum (Mo) or an Mo alloy, a second metal layer disposed on the first metal layer and including silver (Ag) or an Ag alloy, and a third layer disposed on the second metal layer and including a transparent conductive oxide layer;
an organic layer disposed on the first electrode and including an organic emission layer; and
a second electrode disposed on the organic layer,
wherein the second metal layer is thicker than the first metal layer and the third layer.
2. The organic light emitting display device according to claim 1 , wherein the first metal layer has a thickness of 50 Å to 200 Å.
3. The organic light emitting display device according to claim 1 , wherein the Mo alloy is a molybdenum tungsten (MoW) alloy.
4. The organic light emitting display device according to claim 2 , wherein the second metal layer has a thickness of 900 Å to 2000 Å.
5. The organic light emitting display device according to claim 1 , wherein the Ag alloy comprises at least one of samarium (Sm), copper (Cu), terbium (Tb), Mo or tungsten (W).
6. The organic light emitting display device according to claim 1 , wherein the third layer has a thickness of 50 Å to 100 Å.
7. The organic light emitting display device according to claim 1 , wherein the transparent conductive oxide layer comprises indium tin oxide (ITO) or indium zinc oxide (IZO).
8. An electronic device comprising a body containing electronics; and
the organic light emitting display device according to claim 1 mounted on the body.
9. A method of fabricating an organic light emitting display device, comprising:
forming a first electrode on a substrate, the first electrode comprising a first metal layer including molybdenum (Mo) or an Mo alloy, a second metal layer including silver (Ag) or an Ag alloy, and a third layer including a transparent conductive oxide layer;
forming an organic layer including an organic emission layer on the first electrode; and
forming a second electrode on the organic layer,
wherein the second metal layer is thicker than the first metal layer and the third layer.
10. The method according to claim 9 , wherein forming the first electrode further comprises blanket-etching the first electrode using wet-etching.
11. The method according to claim 10 , wherein the wet-etching uses an etchant including phosphoric acid, acetic acid or nitric acid.
12. The method according to claim 9 , wherein the first metal layer is formed to a thickness of 50 Å to 200 Å.
13. The method according to claim 9 , wherein the Mo alloy is a molybdenum tungsten (MoW) alloy.
14. The method according to claim 9 , wherein the second metal layer is formed to a thickness of 900 Å to 2000 Å.
15. The method according to claim 9 , wherein the Ag alloy comprises at least one of samarium (Sm), copper (Cu), terbium (Tb), Mo or tungsten (W).
16. The method according to claim 9 , wherein the third layer is formed to a thickness of 50 Å to 100 Å.
17. The method according to claim 9 , wherein the transparent conductive oxide layer comprises indium tin oxide (ITO) or indium zinc oxide (IZO).
18. The method according to claim 9 , further comprising preparing the substrate.