Methods and apparatus for spatial light modulation

1. A display apparatus comprising:

an array of MEMS-based light modulators;

a liquid in which the array of MEMS-based light modulators is at least partially immersed, and

a transparent substrate on which the array of MEMS-based light modulators are formed, wherein the liquid has a first index of refraction, the transparent substrate has a second index of refraction, and the first index of refraction substantially matches the second index of refraction.

2. The display apparatus of claim 1 , wherein the liquid is sealed into a cavity formed between the transparent substrate and a transparent body.

3. The display apparatus of claim 2 , wherein the transparent substrate is spaced away from and opposite to the transparent body and the liquid fills a gap existing between the MEMS-based light modulators and the transparent body.

4. The display apparatus of claim 2 , wherein the transparent body comprises a cover plate.

5. The display apparatus of claim 2 , wherein the transparent body comprises a light guide.

6. This display apparatus of claim 1 , wherein the liquid has an index of refraction of less than about 1.5.

7. The display apparatus of claim 1 , wherein the liquid has a dielectric constant of above about 2.0.

8. The display apparatus of claim 1 , wherein the liquid is a lubricant.

9. The display apparatus of claim 1 , wherein the liquid has a viscosity below about 10 centipoise.

10. The display apparatus of claim 1 , wherein the liquid has a dielectric breakdown strength above about 10,000 V/cm.

11. The display apparatus of claim 1 , wherein MEMS-based light modulators of the array have surfaces that come into contact during operation of the display apparatus, and the liquid reduces stiction between the surfaces of the MEMS-based light modulators when the surfaces are in contact.

12. The display apparatus of claim 1 , wherein the liquid comprises one of de-ionized water, methanol, ethanol, silicone oils, fluorinated silicone oils, dimethylsiloxane, polydimethylsiloxane, hexamethyldisiloxane, and diethylbenzene.

13. The display apparatus of claim 1 , wherein the MEMS-based light modulators in the array of MEMS-based light modulators comprise shutters.

14. The display apparatus of claim 13 , comprising an aperture layer having a plurality of apertures formed therein positioned proximate the array of MEMS-based light modulators.

15. The display apparatus of claim 14 , wherein the aperture layer comprises a reflective material.

16. The display apparatus of claim 14 , wherein the aperture layer comprises one of a dielectric mirror and a metal.

17. The display apparatus of claim 14 , wherein the shutters are positioned less than about 100 microns from the aperture layer.

18. The display apparatus of claim 14 , wherein the shutters are positioned less than about 10 microns from the aperture layer.

19. A display apparatus comprising:

an array of MEMS-based light modulators; and

a liquid in which the array of MEMS-based light modulators is at least partially immersed, wherein the liquid comprises a silicone oil.

20. The display apparatus of claim 19 , wherein the liquid is sealed into a cavity formed between a substrate, on which the array of MEMS-based light modulators are formed, and a transparent body.

21. The display apparatus of claim 20 , wherein the substrate is spaced away from and opposite to the transparent body and the liquid fills a gap existing between the MEMS-based light modulators and the transparent body.

22. The display apparatus of claim 20 , wherein the transparent body comprises a cover plate.

23. The display apparatus of claim 22 , wherein the substrate is transparent.

24. The display apparatus of claim 23 , wherein the liquid has a first index of refraction, the substrate has a second index of refraction, and wherein the first index of refraction substantially matches the second index of refraction.

25. The display apparatus of claim 20 , wherein the liquid has a first index of refraction, the transparent body has a second index of refraction, and wherein the first index of refraction substantially matches the second index of refraction.

26. The display apparatus of claim 25 , wherein the transparent body comprises a light guide.

27. This display apparatus of claim 19 , wherein the liquid has an index of refraction of less than about 1.5.

28. The display apparatus of claim 19 , wherein the liquid has a dielectric constant of above about 2.0.

29. The display apparatus of claim 19 , wherein the liquid is a lubricant.

30. The display apparatus of claim 19 , wherein the liquid has a viscosity below about 10 centipoise.

31. The display apparatus of claim 19 , wherein the liquid has a dielectric breakdown strength above about 10,000 V/cm.

32. The display apparatus of claim 19 , wherein MEMS-based light modulators of the array have surfaces that come into contact during operation of the display apparatus, and the liquid reduces stiction between surfaces of the MEMS-based light modulators when the surfaces are in contact.

33. The display apparatus of claim 19 , wherein the MEMS-based light modulators in the array of MEMS-based light modulators comprise shutters.

34. The display apparatus of claim 33 , comprising an aperture layer having a plurality of apertures formed therein positioned proximate the array of MEMS-based light modulators.

35. The display apparatus of claim 34 , wherein the aperture layer comprises a reflective material.

36. The display apparatus of claim 34 , wherein the aperture layer comprises one of a dielectric mirror and a metal.

37. The display apparatus of claim 34 , wherein the shutters are positioned less than about 100 microns from the aperture layer.

38. The display apparatus of claim 34 , wherein the shutters are positioned less than about 10 microns from the aperture layer.

39. The display apparatus of claim 19 , wherein the liquid comprises a fluorinated silicone oil.

40. The display apparatus of claim 19 , wherein the liquid comprises a siloxane.