Surface acoustic wave device and method of manufacturing the same
In order to provide a surface acoustic wave device provided with a pseudo-single crystal aluminum electrode film, having excellent power durability, easy to manufacture, and possible to grow with good reproducibility, a titanium buffer film 4 and an electrode film composed of an aluminum film or an aluminum alloy film are formed on a piezoelectric substrate 2 composed of lithium tantalate or lithium niobate. The electrode film 5 comprises a pseudo-single crystal film composed of two (111) domains. Each of the <111> directions of two (111) domains tilts in the range of 0 to 10 degrees to the substrate surface, and the <11-2> directions in the respective (111) domain planes are 1 to 15 degrees apart.
1. A surface acoustic wave device, comprising:
a single crystal piezoelectric substrate composed of lithium tantalate (LiTaO 3 ) or lithium niobate (LiNbO 3 ); and
an electrode formed on the piezoelectric substrate,
wherein the electrode comprises a first film formed of titanium (Ti), and a second film formed of aluminum or aluminum alloy made by adding a small amount of metal atom to aluminum (Al),
wherein the second film is formed of a crystal film including two (111) domains growing in different directions from each other,
wherein both <111> directions of the two (111) domains tilt at angles within 0 to 10 degrees to the surface of the piezoelectric substrate, and
wherein <11-2> directions in an in-plane of each of the (111) domains are arranged uniformly, while the <11-2> direction in the in-plane of one (111) domain and the <11-2> direction in the in-plane of the other (111) domain are 1 to 15 degrees apart from each other.
2. The surface acoustic wave device according to claim 1 , wherein the <11-2> direction of at least one (111) domain out of said two (111) domains is almost parallel to the X-axis direction in the in-plane of said piezoelectric substrate.
3. The surface acoustic wave device according to claim 1 , wherein said two (111) domains are arranged to be nearly in mirror symmetry to the X-axis in the in-plane of the piezoelectric substrate.
4. The surface acoustic wave device according claim 1 , wherein said piezoelectric substrate is a 36 to 50 degree rotated Y-cut lithium tantalate substrate.
5. The surface acoustic wave device according claim 1 , wherein the thickness of said film formed of titanium is 5 nm to 20 nm.
6. The surface acoustic wave device according to claim 1 , wherein said first film is disposed on a surface of the substrate and said second film is disposed on the first film.
7. A method of manufacturing a surface acoustic wave device which comprises a single crystal piezoelectric substrate composed of lithium tantalate (LiTaO 3 ) or lithium niobate (LiNbO 3 ), comprising:
cleaning a surface of the piezoelectric substrate;
forming an electrode on the surface of the piezoelectric substrate following said cleaning, including:
forming a first film formed of titanium (Ti) on the surface of the piezoelectric substrate, and
forming, on said first film, a second film formed of aluminum or aluminum alloy made by adding a small amount of metal atom to aluminum (Al) arranged to form said electrode,
wherein said second film is formed of a crystal film including two (111) domains growing in different directions from each other,
wherein both <111> directions of the two (111) domains tilt at angles within 0 to 10 degrees to the surface of the piezoelectric substrate, and
wherein <11-2> directions in an in-plane of each of the (111) domains are arranged uniformly, while the <11-2> direction in the in-plane of one (111) domain and the <11-2> direction in the in-plane of the other (111) domain are 1 to 15 degrees apart from each other,
wherein the cleaning process cleans the surface of the piezoelectric substrate by applying ultrasonic waves to organic solvent in a state that the organic solvent is in contact with the surface of the piezoelectric substrate, without performing wet etching.
8. The method of manufacturing the surface acoustic wave device according to claim 7 , wherein said forming the second film includes arranging the <11-2> direction of at least one (111) domain out of said two (111) domains almost parallel to the X-axis direction in said piezoelectric substrate surface.
9. The method of manufacturing the surface acoustic wave device according to claim 7 , wherein said forming the second film includes arranging said two (111) domains nearly in mirror symmetry to the X-axis in the piezoelectric substrate surface.