Magnetic disk and magnetic disk manufacturing method
View Patent ↗In a magnetic disk having at least a glass substrate, a plurality of underlayers formed over the glass substrate, and a magnetic layer formed over the plurality of underlayers, at least one of the underlayers is an amorphous underlayer containing a VIa group element and carbon and, given that the remanent magnetization in a circumferential direction of the disk is Mrc and the remanent magnetization in a radial direction of the disk is Mrr, the magnetic disk has a magnetic anisotropy in which Mrc/Mrr being a ratio between Mrc and Mrr exceeds 1.
1. A method of manufacturing a magnetic disk, comprising:
preparing a disk-shaped glass substrate having a surface formed with a texture having substantially regular stripes along a disk circumferential direction,
forming an amorphous CrTi alloy underlayer comprising a CrTi alloy directly on the glass substrate in an argon atmosphere;
forming another amorphous underlayer on the CrTi alloy underlayer in an atmosphere containing at least carbon and oxygen using a material containing a VIa group element, the another amorphous underlayer directly contacting with the CrTi alloy underlayer,
forming at least one crystalline underlayer on the another amorphous underlayer in an atmosphere containing argon, and
forming at least a magnetic layer over the another amorphous underlayer.
2. The magnetic disk manufacturing method according to claim 1 , wherein:
the another amorphous underlayer is formed by reactive sputtering in the atmosphere containing at least carbon and oxygen using a target containing the VIa group element.
3. A method of manufacturing a magnetic disk, comprising:
preparing a disk-shaped glass substrate having a surface formed with a texture having substantially regular stripes along a disk circumferential direction,
forming an amorphous underlayer comprising a CrTi alloy directly on the glass substrate in an argon atmosphere;
forming another amorphous underlayer containing a VIa group element on the CrTi alloy underlayer, the another amorphous underlayer directly contacting with the CrTi alloy underlayer,
bringing the another amorphous underlayer into contact with an atmosphere containing at least carbon and oxygen, and
forming at least a magnetic layer over the another amorphous underlayer.
4. The magnetic disk manufacturing method according to any one of claim 1 , 2 or 3 , wherein:
the prepared glass substrate is disposed in a vacuum chamber, and
each of the CrTi alloy underlayer and the another amorphous underlayer is formed without performing heat treatment.
5. The magnetic disk manufacturing method according to claim 1 or 3 , wherein:
the atmosphere containing at least carbon and oxygen is an atmosphere containing carbon dioxide or an atmosphere containing carbon monoxide.
6. The magnetic disk manufacturing method according to claim 1 or 3 , wherein:
the VIa group element is W or Mo.
7. The magnetic disk manufacturing method according to claim 1 or 3 , wherein:
the material containing the VIa group element is a WCr-based alloy material or a MoCr-based alloy material.
8. The magnetic disk manufacturing method according to claim 7 , wherein:
the WCr-based alloy material or the MoCr-based alloy material contains Cr set to 25 at % to 75 at % in composition ratio.
9. The magnetic disk manufacturing method according to claim 1 or 3 , wherein:
the atmosphere contains a combination of carbon and oxygen in an amount sufficient to increase a magnetic anisotropy.