Semiconductor-element mounting substrate, semiconductor device, and electronic equipment
View Patent ↗A semiconductor-element mounting substrate is a substrate for mounting a semiconductor element, and includes a substrate body. The substrate body has a mounting surface, and the center portion of the mounting surface is provided with a die pattern. Through conductors are provided in a portion of the substrate body located outside the die pattern to penetrate the substrate body in the thicknesswise direction. First terminals and second terminals are connected to the through conductors, respectively. The first terminals each extend toward the outer edge of the mounting surface, and they are electrically connected to the semiconductor element. The second terminals are provided on a surface of the substrate body opposite to the mounting surface.
1. A semiconductor device comprising:
a substrate; and
a semiconductor element mounted on the substrate;
wherein the substrate includes:
a substrate body having a first surface on which the semiconductor element is mounted;
a die pattern formed on the first surface and electrically connected to the semiconductor element;
a plurality of recess portions formed in the substrate body;
a plurality of through conductors, each formed in one of the plurality of recess portions and each extending from the first surface of the substrate body to a second surface opposite to the first surface relative to the die pattern;
a plurality of first terminals, each having an opening which coincides with one of the recess portions and is electrically connected to one of the plurality of through conductors, and each having an extending portion which extends away from an edge of the corresponding one of the recess portions and away from the semiconductor element toward the outer edge of the mounting surface; and
a plurality of bonding wires electrically connecting the extending portion of the first terminals with the semiconductor element.
2. The device of claim 1 , wherein:
at least one of the plurality of first terminals is a first grounding terminal for grounding the die pattern, and
the substrate further comprises a conductive interconnect for electrically connecting the first grounding terminal to the die pattern.
3. The device of claim 1 , wherein the plurality of first terminals are arranged radially from the die pattern.
4. The device of claim 2 , wherein a gold film is provided on the conductive interconnect.
5. The device of claim 1 , wherein the outside dimensions of the die pattern are smaller than those of the semiconductor element.
6. The device of claim 1 , wherein at least an insulative coating is provided over a portion of the substrate body which surrounds the die pattern and which is located closer to the first surface than the through conductors.
7. The device of claim 6 , further comprising a sealing resin for sealing the semiconductor element,
wherein the sealing resin is bonded to the insulative coating.
8. The device of claim 6 , wherein a gold film is provided on a portion of the die pattern not provided with the insulative coating, the first terminals, and the through conductors.
9. The device of claim 1 , wherein the substrate body is made of resin.
10. The device of claim 1 , wherein the semiconductor element is provided in plural.
11. The device of claim 10 , wherein the device is a power amplifier circuit module including a semiconductor element of silicon and a semiconductor element of gallium arsenide.
12. Electronic equipment comprising the semiconductor device of claim 1 .
13. The device of claim 1 , wherein the extending portions of the plurality of first terminals are directly connected to the semiconductor element by the plurality of wires.
14. The device of claim 1 , wherein the plurality of wires include a plurality of bonding wires.
15. The device of claim 1 , further comprising a plurality of second terminals formed on the second surface and electrically connected to the first terminals via the through conductors, respectively.
16. The device of claim 1 , wherein:
a diameter of the recess portion at the first surface is bigger than a diameter of the recess portion at the second surface.
17. The device of claim 1 , wherein:
the through conductors formed in one of the recess portions forms a cone shape such that the diameter of the through conductors at the first surface is larger than the diameter of the through conductors close to the second surface.
18. The device of claim 1 , wherein:
when viewed from the first surface, a shape of the recess portion is a circle.
19. The device of claim 1 , wherein:
each of the plurality of first terminals has a bowling pin shape.