Process of forming a microphone using support member
View Patent ↗A method of forming a microphone forms a backplate, and a flexible diaphragm on at least a portion of a wet etch removable sacrificial layer. The method adds a wet etch resistant material, where a portion of the wet etch resistant material is positioned between the diaphragm and the backplate to support the diaphragm. Some of the wet etch resistant material is not positioned between the diaphragm and backplate. The method then removes the sacrificial material before removing any of the wet etch resistant material added during the prior noted act of adding. The wet etch resistant material then is removed substantially in its entirety after removing at least part of the sacrificial material.
1. A method of forming a MEMS microphone, the method comprising:
providing an SOI wafer having a top layer;
forming a sacrificial material on the top layer of the SOI wafer;
forming a diaphragm on the sacrificial material;
forming a hole through the diaphragm;
forming a channel through the sacrificial material, the hole and channel being in fluid communication, the channel exposing a bottom surface of the diaphragm and a top surface of the top layer of the SOI wafer;
adding wet etch resistant material having a first portion within the channel and a second contiguous portion that is external to channel and substantially completely fills the hole through the diaphragm; and
removing at least a portion of the sacrificial material before removing any of the wet etch resistant material.
2. The method as defined by claim 1 further comprising releasing the diaphragm.
3. The method as defined by claim 1 further comprising removing the wet etch resistant material after removing at least part of the sacrificial material.
4. The method as defined by claim 1 wherein the SOI wafer also has a bottom layer and a middle layer between the top and bottom layers, the method further comprising removing a portion of the bottom layer and the middle layer to form a backside cavity.
5. The method as defined by claim 4 further comprising forming a backplate hole through the top layer of the SOI wafer.
6. The method as defined by claim 1 wherein the wet etch resistant material is unpatterned after the wet etch resistant material is added to the channel.