Memory device etch methods

1. A method of manufacturing a memory device, comprising:

forming a first dielectric layer over a substrate;

forming a charge storage layer over the first dielectric layer;

forming a second dielectric layer over the charge storage layer;

forming a control gate layer over the second dielectric layer;

forming a hard mask layer over the control gate layer;

forming a bottom anti-reflective coating (BARC) layer over the hard mask layer; and

providing an etch chemistry comprising tetrafluoromethane (CF 4 ), trifluoromethane (CHF 3 ), and oxygen (O 2 ), where the flow rate of CF 4 to CHF 3 ranges from about 70:30 to about 99.99:0.1, to etch at least the first dielectric layer, the charge storage layer, the second dielectric layer, and the control gate layer.

2. The method of claim 1 , where the tetrafluoromethane (CF 4 ) is provided at a flow rate ranging from about 70 standard cubic centimeters per minute (sccm) to about 100 sccm.

3. The method of claim 2 , where the tetrafluoromethane (CF 4 ) is provided at the flow rate ranging from about 70 sccm to about 100 sccm for a period ranging from about 50 seconds to about 30 seconds.

4. The method of claim 1 , where the providing an etch chemistry comprises:

providing the oxygen (O 2 ) at a flow rate ranging from about 0.1 sccm to about 50 sccm.

5. The method of claim 4 , where the oxygen (O 2 ) is provided at the flow rate ranging from about 0.1 sccm to about 50 sccm for a period ranging from about 50 seconds to about 20 seconds.

6. The method of claim 1 , where the hard mask layer comprises at least one of an oxide, nitride, or oxynitride.

7. The method of claim 1 , where the memory device has a critical dimension ranging from about 25 nanometers to about 65 nanometers.

8. A method of manufacturing a memory device, comprising:

forming a first dielectric layer over a substrate;

forming a charge storage layer over the first dielectric layer;

forming a second dielectric layer over the charge storage layer;

forming a control gate layer over the second dielectric layer;

forming a hard mask layer over the control gate layer;

forming a bottom anti-reflective coating (BARC) layer over the hard mask layer; and

performing an etch process to etch at least the control gate layer, the etch process comprising an etch chemistry including tetrafluoromethane (CF 4 ), trifluoromethane (CHF 3 ), and at least one of octafluorocyclobutane (C 4 F 8 ), hexafluorobutadiene (C 4 F 6 ), or octafluorocyclopentene (C 5 F 8 ), where the at least one of C 4 F 8 , C 4 F 6 , or C 5 F 8 is provided at a flow rate ranging from about 0.1 sccm to about 20 sccm.

9. The method of claim 8 , where the etch chemistry includes providing the tetrafluoromethane (CF 4 ) and the trifluoromethane (CHF 3 ) at a flow rate ratio ranging from about 99.99:0.1 to about 50:50.

10. The method of claim 9 , where the tetrafluoromethane (CF 4 ) is provided at a flow rate ranging from about 50 sccm to about 100 sccm.

11. The method of claim 10 , where the tetrafluoromethane (CF 4 ) is provided at the flow rate ranging from about 50 sccm to about 100 sccm for a period ranging from about 60 seconds to about 25 seconds.

12. The method of claim 8 , where the octafluorocyclobutane (C 4 F 8 ), the hexafluorobutadiene (C 4 F 6 ), or the octafluorocyclopentene (C 5 F 8 ) is provided at the flow rate ranging from about 0.1 sccm to about 20 sccm for a period ranging from about 25 seconds to about 60 seconds.

13. The method of claim 8 , where the hard mask layer comprises at least one of an oxide, nitride, or oxynitride.

14. The method of claim 8 , where the memory device has a critical dimension ranging from about 80 nanometers to about 150 nanometers.