Electron emitting device and electromagnetic wave generating device using the same
View Patent ↗Provided is an electron emitting device which can achieve high electron emission efficiency even in the case where excitation energy is low. The device includes a carbon nanotube layer which is formed on an SiC substrate and is made up of plural carbon nanotubes vertically oriented with respect to a surface of the SiC substrate; an MgO layer which is formed on and touches the carbon nanotube layer; an ohmic electrode which is connected to the carbon nanotube layer; an electrode which is facing the MgO layer with an air-gap between the MgO layer and the electrode; and a voltage source which applies a voltage between the electrode and the ohmic electrode.
1. An electron emitting device comprising:
a carbon nanotube layer which is formed on a substrate and is made up of plural carbon nanotubes which are vertically oriented with respect to a surface of the substrate and each of which has a sharp tip;
a metal oxide layer which is formed on each of the sharp tips;
a first electrode which is connected to said carbon nanotube layer; and
a second electrode which is facing said metal oxide layer at a distance,
wherein each of the plural carbon nanotubes has a cavity, and an inner wall of the cavity is coated with a metallic oxide used in said metal oxide layer.
2. The electron emitting device according to claim 1 ,
wherein a maximum thickness of said metal oxide layer is less than a maximum diameter of the carbon nanotube.
3. The electron emitting device according to claim 1 ,
wherein a length of said metal oxide layer in a vertical direction with respect to the surface of the substrate is less than a maximum diameter of the carbon nanotube, said metal oxide layer being thickest on the tops of the tips of the plural carbon nanotubes.
4. The electron emitting device according to claim 1 ,
wherein said metal oxide layer is formed between the plural carbon nanotubes.
5. The electron emitting device according to claim 1 ,
wherein the metal oxide layer on the carbon nanotubes is thickest on the tops of the tips of the plural carbon nanotubes.
6. The electron emitting device according to claim 1 ,
wherein said metal oxide layer includes one of MgO, BaO, CaO, BeO, and SrO.
7. The electron emitting device according to claim 1 ,
wherein a thickness of a portion of said metal oxide layer which is on a tip of each of the plural carbon nanotubes is thicker than a thickness of another portion of said metal oxide layer other than the portion on said metal oxide layer which is on the tip of each of the plural carbon nanotubes.
8. An electromagnetic wave generating device comprising:
a carbon nanotube layer which is formed on a substrate and is made up of plural carbon nanotubes which are vertically oriented with respect to a surface of the substrate and each of which has a sharp tip;
a metal oxide layer which is formed on each of the sharp tips;
a light source which irradiates pulse light to said carbon nanotube layer;
a first electrode which is connected to said carbon nanotube layer; and
a second electrode which is facing said metal oxide layer at a distance;
wherein each of the plural carbon nanotubes has a cavity, and an inner wall of the cavity is coated with a metallic oxide used in said metal oxide layer.
9. The electromagnetic wave generating device according to claim 8 ,
wherein the metal oxide layer on the carbon nanotubes is thickest on the tops of the tips of the plural carbon nanotubes.