Semiconductor device
View Patent ↗A semiconductor device includes a transistor region, a first guard ring, a second guard ring, and a silicide region. A first-conductive-type transistor is formed in the transistor region. The first guard ring is a second-conductive-type first impurity diffusion layer surrounding the transistor region with a first width, and is coupled to a first reference potential. The second guard ring is a first-conductive-type transistor second impurity diffusion layer surrounding the first guard ring with a second width. The silicide region is formed on the surface of the second guard ring such that substantially no silicide is formed on a portion of the surface of the second guard ring on the side facing a drain region of the first-conductive-type transistor, and is connected to a second reference potential line whose potential is higher than that of the first reference potential line.
1. A semiconductor device, comprising:
a transistor region in which a first-conductive-type transistor is formed;
a first guard ring that is a second-conductive type first impurity diffusion layer surrounding the transistor region and having a first width, the first guard ring coupled to a first reference potential line;
a second guard ring that is a first-conductive-type second impurity diffusion layer surrounding the first guard ring and having a second width; and
a silicide region disposed on a surface of the second guard ring such that substantially no silicide extends along an entire circumference of the surface of the second guard ring on a side facing a drain region of the first-conductive-type transistor, the silicide region connected to a second reference potential line, the second reference potential line having a potential higher than a potential of the first reference potential line.
2. The semiconductor device according to claim 1 , wherein the portion of the surface of the second guard ring on which substantially no suicide is formed is configured to have a predetermined third width in a circumferential direction.
3. The semiconductor device according to claim 1 , wherein substantially no silicide is formed on a portion with the second width of the surface of the second guard ring in an area close to the drain region of the first-conductive-type transistor.
4. The semiconductor device according to claim 1 , wherein substantially no contact to a metal conductor is formed on the second guard ring in an area close to the drain region of the first-conductive-type transistor.
5. The semiconductor device according to claim 3 , wherein substantially no contact to a metal conductor is formed oh the second guard ring in an area close to the drain region of the first-conductive-type transistor.
6. The semiconductor device according to claim 1 , wherein the suicide region includes a plurality of sub-regions separated from each other, each of the sub-regions coupled to a metal conductor.
7. The semiconductor device according to claim 6 , wherein the suicide region comprises the plurality of sub-regions in an area close to the drain region of the first-conductive-type transistor in a circumferential direction of the second guard ring.