Thin-film transistor and manufacturing method thereof
View Patent ↗A method for forming a thin-film transistor on an insulating substrate includes the steps of: forming a non-single-crystal semiconductor thin film on the insulating substrate; forming a gate insulating film on the non-single-crystal semiconductor thin film; forming a gate electrode including a lower gate electrode and an upper gate electrode on the gate insulating film, the lower gate electrode having a portion that is not covered by the upper gate electrode; forming a source-drain region and an LDD (lightly doped drain) region in the non-single-crystal thin film semiconductor film concurrently by introducing an impurity into the non-single-crystal semiconductor thin film through the gate electrode and the gate insulating film; and etching away an exposed portion of the lower gate electrode by using the upper gate electrode as a mask.
1. A method for manufacturing a thin-film transistor, comprising the steps of:
forming a non-single-crystal semiconductor thin film on an insulating substrate;
forming a gate insulating film on the non-single-crystal semiconductor thin film;
forming a gate electrode including a lower gate electrode and an upper gate electrode on the gate insulating film, the lower gate electrode having a portion that is not covered by the upper gate electrode;
forming a heavily doped region and a lightly doped region in the non-single-crystal semiconductor thin film concurrently by introducing an impurity into the non-single-crystal semiconductor thin film through the gate electrode and the gate insulating film; and
etching away an exposed portion of the lower gate electrode by using the upper gate electrode as a mask,
wherein the step of forming a gate electrode comprises the steps of:
forming a conductive film including a plurality of layers on the gate insulating film; and
forming the gate electrode by selectively etching the conductive film, wherein the step of forming a gate electrode comprises the steps of:
forming a conductive film including a plurality of layers on the gate insulating film;
selectively forming a photoresist film on a top layer of the conductive film; and
forming the upper gate electrode by applying isotropic etching to the conductive film by using the photoresist film as a mask and forming the lower gate electrode by applying anisotropic etching to the conductive film by using the photoresist film as a mask.
2. The method according to claim 1 , wherein the non-single-crystal semiconductor thin film is a polysilicon thin film.
3. The method according to claim 1 , wherein the isotropic etching is wet etching.
4. The method according to claim 3 , wherein the gate insulating film is a silicon dioxide thin film, the conductive film including the plurality of layers includes a lower, microcrystalline silicon thin film and upper, chromium thin film; and an etchant used in the wet etching is an aqueous solution of diammonium cerium (IV) nitrate and perchloric acid.