Array substrate
The invention provides a method for manufacturing an array substrate utilizing a laser ablation process. A conductive layer can be selectively patterned by the laser ablation process without a photo mask due to different adhesions between the conductive layer and other materials. The patterned conductive layer thus formed adjoins an inorganic passivation layer to provide a substantially continuous surface.
1. An array substrate, comprising: a contact pad, a thin film transistor (TFT), a pixel region, and a storage capacitor formed on a substrate; an inorganic passivation layer formed on a part of the contact pad, the TFT, and the storage capacitor; and a conductive layer formed on an other part of the contact pad, an other part of the TFT, an other part of the storage capacitor, and the pixel region; wherein the inorganic passivation layer adjoins the conductive layer to form a substantially continuous surface; and wherein a top surface of the inorganic passivation layer is coplanar with a top surface of the conductive layer in an adjoining region therebetween.
2. The array substrate of claim 1 , wherein the conductive layer comprises transparent conductive materials, opaque conductive materials, or combinations thereof.
3. The array substrate of claim 1 , wherein the inorganic passivation layer comprises a silicon nitride, silicon oxide, silicon oxynitride, silicon carbide, or combinations thereof.
4. The array substrate of claim 1 , wherein a thickness of the inorganic passivation layer is substantially equal to the thickness of the conductive layer.
5. The array substrate of claim 1 , wherein the TFT comprises:
a gate electrode on the substrate;
a dielectric layer on the gate electrode;
a channel layer on the dielectric layer;
an ohmic contact layer and a source/drain metal layer on the channel layer, wherein the ohmic contact layer and the source/drain metal layer have an opening to expose the part of the channel layer.
6. The array substrate of claim 5 , wherein the TFT further comprises an etch stop layer formed on the channel layer.
7. A display incorporating the array substrate of claim 1 .
8. An electro-optical apparatus incorporating the display of claim 7 .