Electronic part utilizing a protective film on a comb-shaped electrode
View Patent ↗An electronic part includes a substrate, a comb-shaped electrode having a plurality of electrode fingers arranged parallel to one another on the upper surface of the substrate, and a protective film formed on the upper surface of the substrate so as to cover the comb-shaped electrode. The protective film has convex portions and concave portions. The convex portions are upwardly convex at the positions corresponding to the electrode fingers, and the concave portions are downwardly concave between the convex portions. The cross section of the protective film in the direction orthogonal to the extending direction of the electrode fingers has a downward convex curve between apex portions of the convex portions.
1. An electronic part comprising:
a substrate having an upper surface;
a comb-shaped electrode having a plurality of electrode fingers arranged parallel to one another on the upper surface of the substrate; and
a protective film disposed on the upper surface of the substrate so as to cover the comb-shaped electrode, wherein
the protective film has convex portions and concave portions in cross section in a direction orthogonal to an extending direction of the electrode fingers, the convex portions being upwardly convex at positions corresponding to the electrode fingers, and the concave portions having a downward convex curve between apex portions of the convex portions, and wherein
a width of the apex portion is smaller than a width of the electrode finger.
2. The electronic part according to claim 1 , wherein
a center position of the apex portion is substantially coincident with a center position of the electrode finger.
3. The electronic part according to claim 1 , wherein
the electronic part satisfies a requirement: 0.05<h/(2×P)<0.15 where P is a pitch of the electrode fingers of the comb-shaped electrode, and h is a film thickness of the comb-shaped electrode.
4. The electronic part according to claim 1 , wherein
the electronic part satisfies a requirement: 0.09≦t/(2×P)≦0.3 where t is a height from the upper surface of the substrate to the apex portion, and P is a pitch of the electrode fingers of the comb-shaped electrode.
5. The electronic part according to claim 1 , wherein
the electronic part satisfies a requirement: 0.12≦t/(2×P)≦0.2 where t is a height from the upper surface of the substrate to the apex portion, and P is a pitch of the electrode fingers of the comb-shaped electrode.
6. The electronic part according to claim 1 , wherein
the electronic part is a surface acoustic wave device.
7. An electronic part comprising:
a substrate having an upper surface;
a comb-shaped electrode having a plurality of electrode fingers arranged parallel to one another on the upper surface of the substrate; and
a protective film disposed on the upper surface of the substrate so as to cover the comb-shaped electrode, wherein:
the protective film has convex portions and concave portions in cross section in a direction orthogonal to an extending direction of the electrode fingers, the convex portions being upwardly convex at positions corresponding to the electrode fingers, and the concave portions having a downward convex curve between apex portions of the convex portions, and
the electronic part satisfies a requirement: 0.01<X/(2×P)<h/(2×P) where X is a height from a lowermost point of the curve to the apex portion, P is a pitch of the electrode fingers of the comb-shaped electrode, and h is a film thickness of the comb-shaped electrode.
8. The electronic part according to claim 7 , wherein
a center position of the apex portion is substantially coincident with a center position of the electrode finger.
9. The electronic part according to claim 7 , wherein
the electronic part satisfies a requirement: 0.05<h/(2×P)<0.15.
10. The electronic part according to claim 7 , wherein
the electronic part satisfies a requirement: 0.09≦t/(2×P)≦0.3 where t is a height from the upper surface of the substrate to the apex portion.
11. The electronic part according to claim 7 , wherein
the electronic part satisfies a requirement: 0.12≦t/(2×P)≦0.2 where t is a height from the upper surface of the substrate to the apex portion.
12. The electronic part according to claim 7 , wherein
the electronic part is a surface acoustic wave device.