Ferrite thin film, method of manufacturing the same and electromagnetic noise suppressor using the same
View Patent ↗A ferrite film is formed by regularly arranging constituents such as magnetized grains or one analogous to that. In the ferrite film, the constituents have at least one of the uniaxial anisotropy and the multiaxial anisotropy. The ferrite film has the magnetic anisotropy or the magnetic isotropy. The ferrite film is formed by the use of the plating method in the presence of a magnetic field. Furthermore, an electromagnetic noise suppressor includes the ferrite film.
1. A method of manufacturing a ferrite film the method includes the steps of:
bringing a reaction solution containing at least a ferrous ion into contact with a substrate;
removing the reaction solution from the substrate;
bringing an oxidizing solution containing at least an oxidant into contact with the substrate; and
removing residue that does not contribute to the formation of the ferrite film of the reaction solution and the oxidizing solution from the substrate, wherein the ferrite film has magnetic anisotropy or is magnetically isotropic; has a ratio of peak in intensities corresponding to a (222) crystal lattice plane and a (311) crystal lattice plane in an x-ray diffraction pattern of a surface of the film and is represented by I 222 /I 311 , said ratio being larger than 0.05; is composed of at least one of Ni, Zn, Fe, and O and contains Co in a molar ratio of Co/(Fe+Ni+Zn+Co) of 0.01/3 to 0.3/3.
2. A method of manufacturing a ferrite film as set forth in claim 1 , wherein the removing the reaction solution and the oxidizing solution from the substrate makes use of the fluidity imparted to the reaction solution and the oxidizing solution due to gravity and a centrifugal force.
3. A method of manufacturing a ferrite film as set forth in claim 1 , wherein the ferrite film is formed by repeating the above-mentioned respective steps.
4. A method of manufacturing a ferrite film as set forth in claim 1 , wherein as the substrate, use is made of a substrate having the center line average roughness Ra of larger than 0 and 10 μm or less.
5. A method of manufacturing a ferrite film, the method including the steps of:
bringing a reaction solution containing at least a ferrous ion into contact with a substrate;
removing the reaction solution from the substrate;
bringing an oxidizing solution containing at least an oxidant into contact with the substrate; and
removing residue that does not contribute to the formation of the ferrite film of the reaction solution and the oxidizing solution from the substrate;
wherein the ferrite film has magnetic anisotropy or is magnetically isotropic; has a ratio of peak in intensities corresponding to a (222) crystal lattice plane and a (311) crystal lattice plane in an X-ray diffraction pattern of a surface of the film and is represented by I 222 /I 311, said ratio being larger than 0.05; is composed of at least one of Ni, Zn, Fe, and O.
6. A method of manufacturing a ferrite film as set forth in claim 5 , wherein the removing the reaction solution and the oxidizing solution from the substrate makes use of the fluidity imparted to the reaction solution and the oxidizing solution due to gravity and a centrifugal force.
7. A method of manufacturing a ferrite film as set forth in claim 5 , wherein the ferrite film is formed by repeating the above-mentioned respective steps.
8. A method of manufacturing a ferrite film as set forth in claim 5 , wherein as the substrate, use is made of a substrate having the center line average roughness Ra of larger than 0 and 10 μm or less.