Granted Patent B2

US 8,006,356 · App. 11/635,409 · Granted Aug 30, 2011

Abstract

Claims (31)

1. A method of making a plurality of electromechanical transducers, comprising:

forming an array of piezo elements on a rigid carrier substrate, wherein the piezo elements are formed from a laminar structure of layered conductive and piezoelectric material, a first side of the laminar structure mechanically attached to the rigid carrier substrate by means of a removable double-sided tape;

planarizing the array of the piezo elements by filling regions between each of the piezo elements with a polymer;

attaching a second, opposite side of the planarized array to a fluid channel substructure; and

removing the rigid carrier substrate and the double-sided tape from the laminar structure.

2. The method of claim 1 , further including:

before the planarizing of the array, dicing the laminar structure comprising the conductive layer and the piezoelectric material;

and

after the planarizing of the array, depositing a metal layer on the second side of the planarized diced laminar structure to form deposited metal diaphragms, wherein the second side corresponds to the piezoelectric material.

3. The method of claim 2 wherein the deposited metal diaphragms are formed by electroless deposition.

4. The method of claim 2 wherein the deposited metal diaphragms are formed by electroplating.

5. The method of claim 2 wherein the deposited metal diaphragms are formed by vacuum deposition.

6. The method of claim 2 wherein the deposited metal diaphragms comprise nickel.

7. The method of claim 2 wherein the deposited metal diaphragms comprise chromium.

8. The method of claim 2 wherein forming of the array of the piezo elements and the deposited metal diaphragms comprises screen printing a plurality of the piezo elements.

9. The method of claim 2 , further including: forming the array of piezo elements by dicing or kerfing the conductive and piezoelectric material to form the array.

10. The method of claim 1 wherein forming the plurality of piezo elements and the deposited metal diaphragms comprises:

depositing the metal layer on the laminar structure comprising the conductive and the piezoelectric material, and the deposited metal diaphragms; and

dicing the laminar structure to produce a plurality of individual piezoelectric transducers.

11. The method of claim 1 further comprising forming an attachment layer on the plurality of piezoelectric transducers.

12. The method of claim 1 further comprising forming a solder layer on the plurality of piezoelectric transducers.

13. The method of claim 1 further comprising forming an adhesive layer on the plurality of piezo elements and the deposited metal diaphragms.

14. The method of claim 1 wherein attaching the fluid channel layer comprises attaching a fluid channel substructure having a conductive polymer diaphragm sub-layer.

15. The method of claim 1 wherein attaching the fluid channel layer comprises attaching a fluid channel substructure having a conductive polyimide diaphragm sub-layer.

16. A method of making a plurality of electromechanical transducers, comprising:

mechanically attaching a laminar structure to a rigid carrier substrate using a double-sided tape;

forming an array of piezo elements by dicing the laminar structure comprising a conductive layer and a piezoelectric layer to produce a plurality of individual piezoelectric transducers;

planarizing the diced laminar structure; and

depositing a metal layer on the array of piezo elements to form piezoelectric transducers; and

attaching the piezoelectric transducers to a fluid channel substructure; and,

removing the rigid carrier substrate and the double-sided tale from the laminar structure.

Assignments (9)