IP Library Granted Patent US 7,463,397
Granted Patent B2
US 7,463,397 · App. 11/636,143 · Granted Dec 9, 2008

Electro-optic modulator

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Quick Facts
Patent No.
US 7,463,397
App. No.
11/636,143
Filed
Dec 7, 2006
Granted
Dec 9, 2008
Kind
B2
Art Unit
2873
USPC
359/245
Abstract

A beam modulator ( 14 ) for modulating a beam ( 20 ) includes a modulator element ( 26 ) and a housing assembly ( 24 ). The modulator element ( 26 ) is positioned in the path of the beam ( 20 ). The housing assembly ( 24 ) retains the modulator element ( 26 ). The housing assembly ( 24 ) can include a housing ( 234 ), a first retainer assembly ( 342 ), and a second retainer assembly ( 344 ). The first retainer assembly ( 342 ) flexibly secures the modulator element ( 26 ) to the housing ( 24 ) and the second retainer assembly ( 344 ) fixedly secures the modulator element ( 26 ) to the housing ( 234 ) with the modulator element ( 26 ) positioned between the retainer assemblies ( 342 ) ( 344 ). With this design, the retainer assemblies ( 342 ) ( 344 ) can cooperate to retain the modulator element ( 26 ) in a fashion that applies a substantially uniform and small pressure across the modulator element ( 26 ).

Claims (31)

1. A beam modulator for modulating a beam having a beam path, the beam modulator comprising:

a modulator element that is positioned in the beam path;

a modulator circuit that is electrical connected to the modulator element, the modulator circuit directing a voltage across the modulator element to change an index of refraction of the modulator element; and

a housing assembly that retains the modulator element, the housing assembly including a housing and a first retainer assembly that flexibly secures the modulator element to the housing.

2. The beam modulator of claim 1 further comprising a second retainer assembly that fixedly secures the modulator element to the housing.

3. The beam modulator of claim 2 wherein the modulator element is positioned between the first retainer assembly and the second retainer assembly.

4. The beam modulator of claim 3 wherein the retainer assemblies cooperate to retain the modulator element in a fashion that applies a small pressure across the modulator element.

5. The beam modulator of claim 3 wherein the retainer assemblies cooperate to retain the modulator element in a fashion that applies a pressure of between approximately 10 and 100 PSI across the modulator element.

6. The beam modulator of claim 1 wherein the first retainer assembly includes a first mount that is secured to the modulator element and a flexible attacher that flexibly attaches the first mount to the housing.

7. The beam modulator of claim 6 wherein the flexible attacher includes an elastic member.

8. The beam modulator of claim 1 further comprising a fastener assembly that urges the retainer assemblies together.

9. A precision apparatus including a beam source that generates a beam and the beam modulator of claim 1 positioned in the path of the beam.

10. A beam modulator for modulating a beam having a beam path, the beam modulator comprising:

a modulator element that is positioned in the beam path;

a modulator circuit that is electrically connected to the modulator element, the modulator circuit directing a voltage across the modulator element to change an index of refraction of the modulator element; and

a housing assembly that retains the modulator element, the housing assembly including a housing, a first retainer assembly that flexibly secures the modulator element to the housing, and a second retainer assembly that fixedly secures the modulator element to the housing, wherein the modulator element is positioned between the first retainer assembly and the second retainer assembly and the retainer assemblies cooperate to retain the modulator element in a fashion that applies a small pressure across the modulator element.

11. The beam modulator of claim 10 wherein the retainer assemblies cooperate to retain the modulator element in a fashion that applies a pressure of between approximately 10 and 100 across the modulator element.

12. The beam modulator of claim 10 wherein the first retainer assembly includes a first mount that is secured to the modulator element and a flexible attacher that flexible attaches the first mount to the housing.

13. The beam modulator of claim 10 further comprising a fastener assembly that urges the retainer assemblies together.

14. A precision apparatus including a beam source that generates a beam and the beam modulator of claim 10 positioned in the path of the beam.

15. A method for modulating a beam, the method comprising the steps of:

positioning a modulator element in a beam path of the beam;

directing a voltage across the modulator element to change an index of refraction of the modulator element;

providing a housing; and

flexibly securing the modulator element to the housing with a first retainer assembly.

16. The method of claim 15 further comprising the step of fixedly securing the modulator element to the housing with a second retainer assembly.

17. The method of claim 16 further comprising the step of positioning the modulator element between the first retainer assembly and the second retainer assembly and urging the retainer assemblies together so that the retainer assemblies cooperate to retain the modulator element in a fashion that applies a small pressure across the modulator element.

18. The beam modulator of claim 1 where the modulator element changes the phase of the beam that passes through the modulator element.

19. The beam modulator of claim 1 wherein the first retainer assembly is positioned substantially on one side of the beam path.

20. The beam modulator of claim 2 wherein the first retainer assembly is positioned substantially on a first side of the beam path and the second retainer assembly is positioned substantially on a second side of the beam path that is opposite to the first side.

21. The beam modulator of claim 4 wherein the pressure across the modulator element is applied in a direction transverse to the beam path.

Assignments (5)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →