Acceleration sensor element and acceleration sensor
View Patent ↗An objective is to provide an acceleration sensor element that has a high detection sensitivity and that realizes an accurate measurement of acceleration; and an acceleration sensor including this acceleration sensor element to realize a smaller size and a thinner thickness. An acceleration sensor element comprises a quartz, has a thickness in a Z axis direction, and is formed in a quartz substrate developed in an orthogonal XY plane. A thin-walled section of a bottom section of a concave section of the quartz substrate has a double-ended vibrating reed in which a pair of vibration arms extend in a Y axis direction. When acceleration in a Z axis direction is applied while this double-ended vibrating reed having bending vibration, the acceleration is detected based on a change in a resonance frequency caused when the double-ended vibrating reed deflects in the Z axis direction.
1. An acceleration sensor element comprising piezoelectric material, that has a thickness in a Z axis direction, and that is formed at a substrate developed in an orthogonal XY plane, wherein
when acceleration in the Z axis direction is applied to the substrate while a double-ended vibrating reed in which a pair of vibration arms extend in a Y axis direction of the substrate having bending vibration, the acceleration is detected based on a change in a resonance frequency caused when the double-ended vibrating reed deflects in the Z axis direction,
both of top and back main surfaces of vibration arms of the double-ended vibrating reed include, in a longitudinal direction of the vibration arms, a groove that has a substantially “H” cross section, and
the groove is divided at an additional mass section provided at a center in the longitudinal direction of the vibration arms.
2. The acceleration sensor element according to claim 1 , wherein
the double-ended vibrating reed is formed at a thin-walled section of a bottom section of a concave section provided in the substrate;
a cantilever arm structure includes:
a fixed section connected with end sections in a −Y axis direction of the pair of vibration arms; and
a weight section connected with end sections in a +Y axis direction of the pair of vibration arms, and
when acceleration is applied, the double-ended vibrating reed deflects in the Z axis direction while the fixed section being as a base section.
3. The acceleration sensor element according to claim 1 , wherein
the double-ended vibrating reed is formed closer to a +Z axis direction side or a −Z axis direction side in a thickness direction.
4. The acceleration sensor element according to claim 1 , wherein the substrate includes a fixed section side and a weight section side located opposite of the substrate to the fixed section side in the Y axis direction and the double-ended vibrating reed is formed closer to the fixed section side in the Y axis direction of the substrate than the weight section side.
5. The acceleration sensor element according to claim 1 , wherein an excitation electrode provided at the double-ended vibrating reed is divided to three parts in a longitudinal direction of the vibration arms to provide reverse potentials of neighboring excitation electrodes.
6. An acceleration sensor, comprising:
the acceleration sensor element according to claim 1 that is stored in a chassis consisting of a case and a covering; and
a fixed section of an end section in a −Y axis direction of the acceleration sensor element is fixed to an inner face of the case.
7. The acceleration sensor element according to claim 6 , further comprising
a control circuit that controls excitation of the double-ended vibrating reed and is located in the chassis, and
the control circuit is provided in a space of a concave section in which the double-ended vibrating reed is formed.