Process for resurf diffusion for high voltage MOSFET
View Patent ↗A starting wafer for high voltage semiconductor devices is formed by implanting arsenic into the top surface of a p type silicon substrate wafer to a depth of about 0.1 micron. A N type non-graded epitaxial layer is then grown atop the substrate without any diffusion step so that the arsenic is not intentionally driven. Device junction are then diffused into the epitaxially grown layer.
1. A process for forming a wafer, said process comprising implanting arsenic into the surface of a P type silicon substrate; said implant having a depth of no more than about 0.1 microns; epitaxially depositing a junction-receiving layer atop said substrate; and forming junction patterns in said junction receiving layer, wherein said forming step includes at least one diffusion drive, which is a first diffusion drive for said arsenic implant, wherein said arsenic implant is driven no further than 0.3 microns, and wherein said junction patterns comprise a lateral conduction MOSFET.
2. The process of claim 1 , wherein said implant is a blanket implant having a constant concentration over substantially the full area of said surface.
3. The process of claim 1 , wherein said arsenic implant has a dose of 5E11 to 3E12 atoms per square cm.
4. The process of claim 3 , wherein said arsenic implant has a dose of 1.3E12 atoms per square cm.
5. The process of claim 1 , wherein said epitaxial layer has a thickness of less than about 5 micrometers and is of the N type concentration.