Inductively-coupled toroidal plasma source
View Patent ↗Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding. The first AC current and the second AC current induce a combined AC potential inside the plasma chamber that directly forms a toroidal plasma that completes a secondary circuit of the transformer and that dissociates the gas.
1. An apparatus for generating a reactive gas comprising:
a) a plasma chamber comprising an electrically conductive material, at least one dielectric region that forms an electrical discontinuity in the chamber that substantially prevents induced current flow from forming in the plasma chamber, and a protrusion of a wall of the plasma chamber that protects the dielectric region;
b) a transformer having a magnetic core surrounding a portion of the plasma chamber and a primary winding; and
c) an AC power supply providing current to the primary winding, the current inducing an AC potential inside the chamber to form a toroidal plasma which completes a secondary circuit of the transformer and generates the reactive gas.
2. The apparatus of claim 1 , wherein the AC power supply is an AC switching power supply.
3. The apparatus of claim 2 , wherein the AC switching power supply is a solid state AC switching power supply.
4. The apparatus of claim 1 , wherein the dielectric region comprises a dielectric spacer.
5. The apparatus of claim 1 , wherein the dielectric region comprises a dielectric coating on a surface of the plasma chamber.
6. The apparatus of claim 4 , comprising a vacuum seal located outside the dielectric spacer.
7. The apparatus of claim 1 , comprising a plurality of dielectric regions.
8. The apparatus of claim 1 , wherein the plasma chamber is a toroidal plasma chamber.
9. The apparatus of claim 1 , comprising a free charge generator that assists the ignition of a plasma in the chamber.
10. The apparatus of claim 9 , wherein the free charge generator is an electrode or a UV light source.
11. The apparatus of claim 1 , wherein the plasma chamber comprises a metallic material or a coated metallic material.
12. The apparatus of claim 1 , wherein the plasma is generated from a noble gas, reactive gas or a mixture of a noble gas and reactive gas.
13. The apparatus of claim 1 , wherein the reactive gas comprises an atomic gas, dissociated gas, or activated gas.
14. The apparatus of claim 1 , comprising a process chamber that is coupled to the plasma chamber and positioned to receive reactive gas generated by the plasma.
15. The apparatus of claim 1 , wherein the AC power supply comprises one or more switching semiconductor devices.
16. A method for generating a reactive gas, comprising:
providing a gas to a plasma chamber comprising an electrically conductive material and at least one dielectric region that forms an electrical discontinuity in the plasma chamber that substantially prevents induced current flow from forming in the plasma chamber and comprising a protrusion of a wall of the plasma chamber that protects the dielectric region;
driving a primary winding of a transformer surrounding a portion of the plasma chamber with a current generated by an AC power supply;
inducing an AC potential inside the plasma chamber with the current in the primary winding, the AC potential directly forming a plasma which completes a secondary circuit of the transformer; and
generating reactive gas in the plasma.
17. The method of claim 16 , comprising driving the primary winding of the transformer with a current generated by an AC switching power supply having one or more switching semiconductor devices.
18. The method of claim 16 , comprising providing an initial ionization event in the plasma chamber.
19. The method of claim 18 , wherein providing an initial ionization event in the plasma chamber comprises applying a voltage pulse to the primary winding.
20. The method of claim 18 , wherein providing an initial ionization event in the plasma chamber comprises exposing the plasma chamber to ultraviolet light.
21. The method of claim 16 , comprising generating free charges in the plasma chamber with an electrode positioned in the plasma chamber.
22. The method of claim 16 , wherein the dielectric region comprises a dielectric spacer.
23. The method of claim 16 , wherein the dielectric region comprises a dielectric coating on a surface of the plasma chamber.
24. The method of claim 22 , wherein a vacuum seal is located outside the dielectric spacer.
25. The method of claim 16 , wherein the plasma chamber comprises a plurality of dielectric regions.
26. The method of claim 16 , comprising directing the reactive gas into a process chamber.