Self-pulsation nitride semiconductor laser device and method for fabricating the same
View Patent ↗In a buried type structure including an active layer sandwiched between an n-type cladding layer and a p-type cladding layer and a current blocking layer having an opening for confining a current flowing to the active layer, a regrown layer made of a nitride semiconductor doped with a p-type impurity is formed on the current blocking layer so as to cover the opening of the current blocking layer, and a portion of the regrown layer buried in the opening disposed to be adjacent to a side face of the opening and having a given width W is changed to have the n-type conductivity. Accordingly, the opening of the current blocking layer is effectively narrowed, so as to realize a self-pulsation nitride semiconductor laser device.
1. A self-pulsation nitride semiconductor laser device comprising:
an active layer sandwiched between cladding layers; and
a current blocking layer having an opening for confining a current flowing to said active layer,
wherein a regrown layer made of a nitride semiconductor doped with a p-type impurity is formed on said current blocking layer for covering said opening of said current blocking layer,
a portion of said regrown layer buried in said opening of said current blocking layer has an n-type conductivity,
said portion is disposed to be adjacent to a side face of said opening, and said portion has a given width,
one side of said given width that is located near the active layer is longer than the opposite side of said given width, and
an Al composition ratio in said portion is smaller than an Al composition ratio in said current blocking layer.
2. The self-pulsation nitride semiconductor laser device of claim 1 , wherein said given width is 0.25 μm or more.
3. The self-pulsation nitride semiconductor laser device of claim 1 ,
wherein said current blocking layer is made of a nitride semiconductor layer doped with an n-type impurity.
4. The self-pulsation nitride semiconductor laser device of claim 1 , wherein said current blocking layer has a smaller refractive index than said regrown layer.
5. The self-pulsation nitride semiconductor laser device of claim 1 ,
wherein said regrown layer corresponds to a part of said cladding layers.
6. The self-pulsation nitride semiconductor laser device of claim 1 , wherein said current blocking layer is AlGaN.
7. The self-pulsation nitride semiconductor laser device of claim 1 , wherein said portion is GaN.