Fabricating method of plastic substrate
View Patent ↗This invention relates to a fabricating method of a plastic substrate adapted to improve the stability of a display device fabrication process. The fabrication process utilizes the plastic substrate, which is inexpensive and easy to obtain. A fabricating method according to an embodiment of the present invention includes providing a plastic substrate; spreading an organic film on the plastic substrate; and applying heat to the plastic substrate over which the organic film is spread to conduct heat to the plastic substrate and to harden the organic film at the same time.
1. A fabricating method, comprising:
providing a plastic substrate;
spreading an organic film over the plastic substrate;
applying heat to the plastic substrate over which the organic film is spread to conduct heat to the plastic substrate and to harden the organic film at the same time; and
forming at least a wire line on the organic film after applying heat to the plastic substrate.
2. The fabricating method according to claim 1 , wherein the heat applied to the plastic substrate and the organic film on the plastic substrate has a temperature range of not less than 200° C. and not more than a glass transition temperature of the plastic substrate.
3. The fabricating method according to claim 2 , wherein the heat applied to the plastic substrate is applied for 20 hours or more.
4. The fabricating method according to claim 1 , wherein the heat is applied to the plastic substrate so that a ratio between a change in length of an x-axis of the plastic substrate and a change in length of a y-axis is below 1.3:1.
5. The fabricating method according to claim 1 , wherein the organic film is selected from the group consisting of benzocyclobutene, acrylic resin, epoxy resin, polyvinyl phenol and polyvinyl alcohol (PVA).
6. The fabricating method according to claim 1 , wherein the organic film excludes a hydroxyl radical.
7. The fabricating method according to claim 1 , wherein the plastic substrate is selected from the group consisting of polyethylene naphthalate, polyethylene terephthalate and polycarbonate.
8. The fabricating method according to claim 1 , wherein the plastic substrate is a substrate for a thin film transistor device.
9. The fabricating method according to claim 1 , further comprising dissolving an organic material in an organic solvent to form the organic film before spreading the organic film on the plastic substrate.
10. A fabricating method, comprising:
providing a plastic substrate having heat directivity to deform in one-direction in which heat is applied;
spreading an organic film over the plastic substrate;
applying the heat to the plastic substrate over which the organic film is spread to conduct heat to the plastic substrate and to harden the organic film at the same time; and
forming at least a wire line on the organic film after applying heat to the plastic substrate.
11. The fabricating method according to claim 10 , wherein the heat applied to the plastic substrate and the organic film on the plastic substrate has a temperature range of not less than 200° C. and not more than a glass transition temperature of the plastic substrate.
12. The fabricating method according to claim 11 , wherein the heat applied to the plastic substrate is applied for 20 hours or more.
13. The fabricating method according to claim 10 , wherein the heat is applied to the plastic substrate so that a ratio between a change in length of an x-axis of the plastic substrate and a change in length of a y-axis is below 1.3:1.
14. The fabricating method according to claim 10 , wherein the organic film is selected from the group consisting of benzocyclobutene, acrylic resin, epoxy resin, polyvinyl phenol and polyvinyl alcohol (PVA).
15. The fabricating method according to claim 10 , wherein the organic film excludes a hydroxyl radical.
16. The fabricating method according to claim 10 , wherein the plastic substrate is selected from the group consisting of polyethylene naphthalate, polyethylene terephthalate and polycarbonate.
17. The fabricating method according to claim 10 , wherein the plastic substrate is a substrate for a thin film transistor device.
18. The fabricating method according to claim 10 , further comprising dissolving an organic material in an organic solvent to form the organic film before spreading the organic film on the plastic substrate.